@INPROCEEDINGS{1616146,
author={Pang, Changlin and Cham, J. G. and Nenadic, Z. and Musallam, Sam and Tai,Yu-Chong and Burdick,J. W. and Andersen, R. A.},
booktitle={Proceedings of the 27th Annual International Conference of the IEEE Engineering in Medicine and Biology Society},
title={A New Multi-Site Probe Array with Monolithically Integrated Parylene Flexible Cable for Neural Prostheses},
year={2005},
volume={},
number={},
pages={7114 -7117},
abstract={This work presents a new multi-site probe array applied with parylene technology, used for neural prostheses to record high-level cognitive neural signals. Instead of inorganic materials (e.g. silicon dioxide, silicon nitride), the electrodes and conduction traces on probes are insulated by parylene, which is a polymer material with high electrical resistivity, mechanical flexibility, biocompatibility and easy deposition process. As a result, the probes exhibit better electrical and mechanical properties. The all dry process is demonstrated to fabricate these probe arrays with monolithically integrated parylene flexible cables using double-side-polished (DSP) wafers. With the parylene flexible cables, the probes can be easily assembled to a high density 3-D array for chronic implantation},
keywords={all dry process;chronic implantation;conduction traces;double-side-polished wafers;electrical properties;electrodes;high density 3-D array;high-level cognitive neural signals;mechanical properties;monolithically integrated parylene flexible cable;multisite probe array;neural prostheses;polymer;arrays;bioelectric potentials;biomedical electrodes;cognition;neurophysiology;polymers;prosthetics;},
doi={10.1109/IEMBS.2005.1616146},
URL = {http://npl.mcgill.ca/Papers/newmultisitemonolithicprobe.pdf},
ISSN={},
}

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Instead of inorganic materials (e.g. silicon dioxide, silicon nitride), the electrodes and conduction traces on probes are insulated by parylene, which is a polymer material with high electrical resistivity, mechanical flexibility, biocompatibility and easy deposition process. As a result, the probes exhibit better electrical and mechanical properties. The all dry process is demonstrated to fabricate these probe arrays with monolithically integrated parylene flexible cables using double-side-polished (DSP) wafers. 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A.},\r\nbooktitle={Proceedings of the 27th Annual International Conference of the IEEE Engineering in Medicine and Biology Society},\r\ntitle={A New Multi-Site Probe Array with Monolithically Integrated Parylene Flexible Cable for Neural Prostheses},\r\nyear={2005},\r\nvolume={},\r\nnumber={},\r\npages={7114 -7117},\r\nabstract={This work presents a new multi-site probe array applied with parylene technology, used for neural prostheses to record high-level cognitive neural signals. Instead of inorganic materials (e.g. silicon dioxide, silicon nitride), the electrodes and conduction traces on probes are insulated by parylene, which is a polymer material with high electrical resistivity, mechanical flexibility, biocompatibility and easy deposition process. As a result, the probes exhibit better electrical and mechanical properties. 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