Dissociative chemisorption of O2 inducing stress corrosion cracking in silicon crystals. Gleizer, A., Peralta, G., Kermode, J. R., Vita, A. D., & Sherman, D. Physical Review Letters, American Physical Society, March, 2014. Paper abstract bibtex Fracture experiments to evaluate the cleavage energy of the (110)[1-10] and (111)[11-2] cleavage systems in silicon at room temperature and humidity give 2.7 +/- 0.3 and 2.2 +/-0.2 J/m ̂2, respectively, lower than any previous measurement and inconsistent with density functional theory (DFT) surface energy calculations of 3.46 and 2.88 J/m ̂2. However, in an inert gas environment, we measure values of 3.5 +/- 0.2 and 2.9 +/- 0.2 J/m ̂2, consistent with DFT, that suggest a previously undetected stress corrosion cracking scenario for Si crack initiation in room conditions. This is fully confirmed by hybrid quantum-mechanics?molecular-mechanics calculations.
@article{wrap64444,
volume = {Volume 112},
number = {Number 11},
month = {March},
author = {Anna Gleizer and Giovanni Peralta and James R. Kermode and Alessandro De Vita and Dov Sherman},
title = {Dissociative chemisorption of O2 inducing stress corrosion cracking in silicon crystals},
publisher = {American Physical Society},
journal = {Physical Review Letters},
year = {2014},
url = {https://wrap.warwick.ac.uk/64444/},
abstract = {Fracture experiments to evaluate the cleavage energy of the (110)[1-10] and (111)[11-2] cleavage systems in silicon at room temperature and humidity give 2.7 +/- 0.3 and 2.2 +/-0.2 J/m{\^{ }}2, respectively, lower than any previous measurement and inconsistent with density functional theory (DFT) surface energy calculations of 3.46 and 2.88 J/m{\^{ }}2. However, in an inert gas environment, we measure values of 3.5 +/- 0.2 and 2.9 +/- 0.2 J/m{\^{ }}2, consistent with DFT, that suggest a previously undetected stress corrosion cracking scenario for Si crack initiation in room conditions. This is fully confirmed by hybrid quantum-mechanics?molecular-mechanics calculations.}
}
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