@article{__2013-11,
	title = {Микроболометрические детекторы ИК-диапазона на основе поликристаллического {SiGe}},
	url = {http://www.mashin.ru/eshop/journals/nanoinzheneriya/2013/12/},
	language = {russian},
	number = {12},
	journal = {Наноинженерия},
	author = {Войцеховский, А.В. and Кульчицкий, Н.А. and Мельников, А.А. and Несмелов, С.Н.},
	year = {2013},
	pages = {27--35}
}

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