Light scatter from polysilicon and aluminum surfaces and comparison with surface-roughness statistics by atomic force microscopy. Bawolek, E. J., Mohr, J. B., Hirleman, E. D., & Majumdar, A. Applied Optics, 32:3377, 1993-07-01, 1993.
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Paper bibtex
Paper bibtex @article {785,
title = {Light scatter from polysilicon and aluminum surfaces and comparison with surface-roughness statistics by atomic force microscopy},
journal = {Applied Optics},
volume = {32},
year = {1993},
month = {1993-07-01},
pages = {3377},
isbn = {0003-6935, 1539-4522},
url = {https://www.osapublishing.org/ao/abstract.cfm?uri=ao-32-19-3377},
author = {Bawolek, E. J. and Mohr, James B. and Hirleman, E. D. and Majumdar, A.}
}Downloads: 0
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