A silicon carbide differential output pressure sensor by concentrically matched capacitance. Beker, L., Maralani, A., Lin, L., & Pisano, A. P In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), pages 981–984, 2017. IEEE. bibtex @inproceedings{beker2017silicon,
title={A silicon carbide differential output pressure sensor by concentrically matched capacitance},
author={Beker, Levent and Maralani, Ayden and Lin, Liwei and Pisano, Albert P},
booktitle={2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)},
pages={981--984},
year={2017},
organization={IEEE}
}
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