3D patterning of Ag nanoparticles by ULE ion implantation and stencil soft lithography for plasmonic device applications. BenAssayag, G., Farcau, C., Benzo, P., Cattaneo, L., Bonafos, C., Pecassou, B., Zwick, A., & Carles, R. Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms, 272:214–217, February, 2012. WOS:000301159900050doi abstract bibtex Combining ultra-low-energy ion beam synthesis (ULE-IBS) and stencil mask fabrication is shown to be well adapted for obtaining in a single step-3D patterns of embedded metallic nanoparticles assemblies. We demonstrate how it offers new opportunities particularly well adapted to high throughput and large scale applications in plasmonics. We originally developed this method to get silver (Ag) nanoparticle (NPs) planar arrays embedded in silica (SiO2) on a silicon substrate. Shallow nanometer-sized Ag NPs structures exhibiting surface plasmon resonance are then synthesized at few nm below the surface. The maps of the Ag NPs Raman response perfectly correlate the structural images obtained by SEM and AFM. In addition, the AFM surface profile suggests an in-plane diffusion of the silver: fabrication issues such as diffusion and surface sputtering are discussed. (C) 2011 Elsevier B.V. All rights reserved.
@article{benassayag_3d_2012,
title = {{3D} patterning of {Ag} nanoparticles by {ULE} ion implantation and stencil soft lithography for plasmonic device applications},
volume = {272},
issn = {0168-583X},
doi = {10.1016/j.nimb.2011.01.068},
abstract = {Combining ultra-low-energy ion beam synthesis (ULE-IBS) and stencil mask fabrication is shown to be well adapted for obtaining in a single step-3D patterns of embedded metallic nanoparticles assemblies. We demonstrate how it offers new opportunities particularly well adapted to high throughput and large scale applications in plasmonics. We originally developed this method to get silver (Ag) nanoparticle (NPs) planar arrays embedded in silica (SiO2) on a silicon substrate. Shallow nanometer-sized Ag NPs structures exhibiting surface plasmon resonance are then synthesized at few nm below the surface. The maps of the Ag NPs Raman response perfectly correlate the structural images obtained by SEM and AFM. In addition, the AFM surface profile suggests an in-plane diffusion of the silver: fabrication issues such as diffusion and surface sputtering are discussed. (C) 2011 Elsevier B.V. All rights reserved.},
language = {English},
journal = {Nuclear Instruments \& Methods in Physics Research Section B-Beam Interactions with Materials and Atoms},
author = {BenAssayag, Gerard and Farcau, Cosmin and Benzo, Patrizio and Cattaneo, Laura and Bonafos, Caroline and Pecassou, Beatrice and Zwick, Antoine and Carles, Robert},
month = feb,
year = {2012},
note = {WOS:000301159900050},
keywords = {Ion beam synthesis, Ion implantation, Plasmonic, Silver, Stencil, sio2 layer},
pages = {214--217},
}
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{"_id":{"_str":"534297d80e946d920a002091"},"__v":1,"authorIDs":[],"author_short":["BenAssayag, G.","Farcau, C.","Benzo, P.","Cattaneo, L.","Bonafos, C.","Pecassou, B.","Zwick, A.","Carles, R."],"bibbaseid":"benassayag-farcau-benzo-cattaneo-bonafos-pecassou-zwick-carles-3dpatterningofagnanoparticlesbyuleionimplantationandstencilsoftlithographyforplasmonicdeviceapplications-2012","bibdata":{"bibtype":"article","type":"article","title":"3D patterning of Ag nanoparticles by ULE ion implantation and stencil soft lithography for plasmonic device applications","volume":"272","issn":"0168-583X","doi":"10.1016/j.nimb.2011.01.068","abstract":"Combining ultra-low-energy ion beam synthesis (ULE-IBS) and stencil mask fabrication is shown to be well adapted for obtaining in a single step-3D patterns of embedded metallic nanoparticles assemblies. We demonstrate how it offers new opportunities particularly well adapted to high throughput and large scale applications in plasmonics. We originally developed this method to get silver (Ag) nanoparticle (NPs) planar arrays embedded in silica (SiO2) on a silicon substrate. Shallow nanometer-sized Ag NPs structures exhibiting surface plasmon resonance are then synthesized at few nm below the surface. The maps of the Ag NPs Raman response perfectly correlate the structural images obtained by SEM and AFM. In addition, the AFM surface profile suggests an in-plane diffusion of the silver: fabrication issues such as diffusion and surface sputtering are discussed. (C) 2011 Elsevier B.V. All rights reserved.","language":"English","journal":"Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms","author":[{"propositions":[],"lastnames":["BenAssayag"],"firstnames":["Gerard"],"suffixes":[]},{"propositions":[],"lastnames":["Farcau"],"firstnames":["Cosmin"],"suffixes":[]},{"propositions":[],"lastnames":["Benzo"],"firstnames":["Patrizio"],"suffixes":[]},{"propositions":[],"lastnames":["Cattaneo"],"firstnames":["Laura"],"suffixes":[]},{"propositions":[],"lastnames":["Bonafos"],"firstnames":["Caroline"],"suffixes":[]},{"propositions":[],"lastnames":["Pecassou"],"firstnames":["Beatrice"],"suffixes":[]},{"propositions":[],"lastnames":["Zwick"],"firstnames":["Antoine"],"suffixes":[]},{"propositions":[],"lastnames":["Carles"],"firstnames":["Robert"],"suffixes":[]}],"month":"February","year":"2012","note":"WOS:000301159900050","keywords":"Ion beam synthesis, Ion implantation, Plasmonic, Silver, Stencil, sio2 layer","pages":"214–217","bibtex":"@article{benassayag_3d_2012,\n\ttitle = {{3D} patterning of {Ag} nanoparticles by {ULE} ion implantation and stencil soft lithography for plasmonic device applications},\n\tvolume = {272},\n\tissn = {0168-583X},\n\tdoi = {10.1016/j.nimb.2011.01.068},\n\tabstract = {Combining ultra-low-energy ion beam synthesis (ULE-IBS) and stencil mask fabrication is shown to be well adapted for obtaining in a single step-3D patterns of embedded metallic nanoparticles assemblies. We demonstrate how it offers new opportunities particularly well adapted to high throughput and large scale applications in plasmonics. We originally developed this method to get silver (Ag) nanoparticle (NPs) planar arrays embedded in silica (SiO2) on a silicon substrate. Shallow nanometer-sized Ag NPs structures exhibiting surface plasmon resonance are then synthesized at few nm below the surface. The maps of the Ag NPs Raman response perfectly correlate the structural images obtained by SEM and AFM. In addition, the AFM surface profile suggests an in-plane diffusion of the silver: fabrication issues such as diffusion and surface sputtering are discussed. (C) 2011 Elsevier B.V. All rights reserved.},\n\tlanguage = {English},\n\tjournal = {Nuclear Instruments \\& Methods in Physics Research Section B-Beam Interactions with Materials and Atoms},\n\tauthor = {BenAssayag, Gerard and Farcau, Cosmin and Benzo, Patrizio and Cattaneo, Laura and Bonafos, Caroline and Pecassou, Beatrice and Zwick, Antoine and Carles, Robert},\n\tmonth = feb,\n\tyear = {2012},\n\tnote = {WOS:000301159900050},\n\tkeywords = {Ion beam synthesis, Ion implantation, Plasmonic, Silver, Stencil, sio2 layer},\n\tpages = {214--217},\n}\n\n","author_short":["BenAssayag, G.","Farcau, C.","Benzo, P.","Cattaneo, L.","Bonafos, C.","Pecassou, B.","Zwick, A.","Carles, R."],"key":"benassayag_3d_2012","id":"benassayag_3d_2012","bibbaseid":"benassayag-farcau-benzo-cattaneo-bonafos-pecassou-zwick-carles-3dpatterningofagnanoparticlesbyuleionimplantationandstencilsoftlithographyforplasmonicdeviceapplications-2012","role":"author","urls":{},"keyword":["Ion beam synthesis","Ion implantation","Plasmonic","Silver","Stencil","sio2 layer"],"metadata":{"authorlinks":{}},"html":""},"bibtype":"article","biburl":"https://bibbase.org/zotero/spintextures","downloads":0,"keywords":["ion beam synthesis","ion implantation","plasmonic","silver","stencil","sio2 layer"],"search_terms":["patterning","nanoparticles","ule","ion","implantation","stencil","soft","lithography","plasmonic","device","applications","benassayag","farcau","benzo","cattaneo","bonafos","pecassou","zwick","carles"],"title":"3D patterning of Ag nanoparticles by ULE ion implantation and stencil soft lithography for plasmonic device applications","year":2012,"dataSources":["nLho29PvMiq3Di5k6","rXHvWQJHcL8ctHS4s"]}