Towards low-loss monolithic silicon and nitride photonic building blocks in state-of-the-art 300mm CMOS foundry. Bian, Y., Ayala, J., Meagher, C., Peng, B., Rakowski, M., Jacob, A., Nummy, K., Stricker, A., Sowinski, Z., Sahin, A., Aboketaf, A., Hu, S., Stobert, I., Mclean, K., Medina, L., Dezfulian, K., Harris, B., Krishnamurthy, S., Houghton, T., Lee, W. S., Sorbara, M., Riggs, D., Letavic, T., Yu, A., Giewont, K., & Pellerin, J. In Frontiers in Optics / Laser Science, 2020. Optical Society of America. ![Towards low-loss monolithic silicon and nitride photonic building blocks in state-of-the-art 300mm CMOS foundry [link]](https://bibbase.org/img/filetypes/link.svg "link")
Paper doi abstract bibtex We review recent progress in loss reduction of Si and SiN waveguides in GLOBALFOUNDRIES 300mm monolithic Si photonics platform. Primary challenges to creating low-loss CMOS integrated photonic components are highlighted and potential solutions are outlined.
@inproceedings{Bian:20,
author = {Yusheng Bian and Javier Ayala and Colleen Meagher and Bo Peng and Michal Rakowski and Ajey Jacob and Karen Nummy and Andy Stricker and Zoey Sowinski and Asli Sahin and Abdelsalam Aboketaf and Shuren Hu and Ian Stobert and Kate Mclean and Louis Medina and Kevin Dezfulian and Brendan Harris and Subramanian Krishnamurthy and Thomas Houghton and Won Suk Lee and Massimo Sorbara and Dave Riggs and Ted Letavic and Anthony Yu and Ken Giewont and John Pellerin},
booktitle = {Frontiers in Optics / Laser Science},
keywords = {Immersion lithography; Phase matching; Ring resonators; Silicon; Silicon photonics; Waveguides},
publisher = {Optical Society of America},
title = {Towards low-loss monolithic silicon and nitride photonic building blocks in state-of-the-art 300mm CMOS foundry},
year = {2020},
url = {http://www.osapublishing.org/abstract.cfm?URI=FiO-2020-FW5D.2},
doi = {10.1364/FIO.2020.FW5D.2},
abstract = {We review recent progress in loss reduction of Si and SiN waveguides in GLOBALFOUNDRIES 300mm monolithic Si photonics platform. Primary challenges to creating low-loss CMOS integrated photonic components are highlighted and potential solutions are outlined.},
}
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