{"_id":"9vHNG6HEarpEYqMA5","bibbaseid":"bian-ramachandran-peng-hedrick-donegan-lubguban-fasano-rundquist-etal-3dintegratedlaserattachtechnologyon300mmmonolithicsiliconphotonicsplatform-2020","author_short":["Bian, Y.","Ramachandran, K.","Peng, B.","Hedrick, B.","Donegan, K.","Lubguban, J.","Fasano, B.","Rundquist, A.","Pape, J.","Sahin, A.","Houghton, T.","Nummy, K.","Steffes, J.","Medina, L.","Roy, S. G.","Cox, H.","Green, B.","Dezfulian, K.","Lee, W. 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High accuracy bonding of laser inside a cavity in the SiPh die was accomplished. Optical power up to 10dBm was demonstrated through direct butt-coupling of the laser to SiPh die.","keywords":"elemental semiconductors;integrated optics;integrated optoelectronics;microassembling;semiconductor lasers;silicon;GLOBALFOUNDRIES monolithic silicon photonics platform;high accuracy bonding;SiPh die;3D integrated laser attach technology;optical power;direct butt-coupling;hybrid laser attach technology;Si;Integrated optics;Integrated circuits;Three-dimensional displays;Semiconductor lasers;Power lasers;Silicon;Photonics;Semiconductor lasers;monolithic silicon photonics;hybrid integration;photonic integrated circuits","doi":"10.1109/IPC47351.2020.9252280","issn":"2575-274X","month":"September","bibtex":"@INPROCEEDINGS{9252280,\r\n author={Y. {Bian} and K. {Ramachandran} and B. {Peng} and B. {Hedrick} and K. {Donegan} and J. {Lubguban} and B. {Fasano} and A. {Rundquist} and J. {Pape} and A. {Sahin} and T. {Houghton} and K. {Nummy} and J. {Steffes} and L. {Medina} and S. G. {Roy} and H. {Cox} and B. {Green} and K. {Dezfulian} and W. S. {Lee} and A. {Stricker} and K. {Mclean} and S. {Hu} and Z. {Sowinski} and C. {Meagher} and A. {Aboketaf} and M. {Rakowski} and M. {Randall} and I. {Melville} and D. {Riggs} and A. {Jacob} and R. {Augur} and D. {Berger} and A. {Yu} and K. {Giewont} and J. {Pellerin}},\r\n booktitle={2020 IEEE Photonics Conference (IPC)}, \r\n title={3D Integrated Laser Attach Technology on 300-mm Monolithic Silicon Photonics Platform}, \r\n year={2020},\r\n pages={1-2},\r\n abstract={A hybrid laser attach technology was demonstrated on GLOBALFOUNDRIES 300-mm monolithic silicon photonics (SiPh) platform. High accuracy bonding of laser inside a cavity in the SiPh die was accomplished. Optical power up to 10dBm was demonstrated through direct butt-coupling of the laser to SiPh die.},\r\n keywords={elemental semiconductors;integrated optics;integrated optoelectronics;microassembling;semiconductor lasers;silicon;GLOBALFOUNDRIES monolithic silicon photonics platform;high accuracy bonding;SiPh die;3D integrated laser attach technology;optical power;direct butt-coupling;hybrid laser attach technology;Si;Integrated optics;Integrated circuits;Three-dimensional displays;Semiconductor lasers;Power lasers;Silicon;Photonics;Semiconductor lasers;monolithic silicon photonics;hybrid integration;photonic integrated circuits},\r\n doi={10.1109/IPC47351.2020.9252280},\r\n ISSN={2575-274X},\r\n month={September}\r\n} \r\n\r\n\r\n\r\n","author_short":["Bian, Y.","Ramachandran, K.","Peng, B.","Hedrick, B.","Donegan, K.","Lubguban, J.","Fasano, B.","Rundquist, A.","Pape, J.","Sahin, A.","Houghton, T.","Nummy, K.","Steffes, J.","Medina, L.","Roy, S. 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