Process induced strains in FDSOI devices: a contribution of dark-field electron holography. Boureau, V., Hÿtch, M., Daniel, B., & Claverie, A. In Micro and Nano 2015, 2015. bibtex @inproceedings{boureau_process_2015,
title = {Process induced strains in {FDSOI} devices: a contribution of dark-field electron holography},
booktitle = {Micro and {Nano} 2015},
author = {Boureau, Victor and Hÿtch, Martin and Daniel, Benoit and Claverie, Alain},
year = {2015},
}
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{"_id":"aX8QH5fN4KHB7TTQ2","bibbaseid":"boureau-htch-daniel-claverie-processinducedstrainsinfdsoidevicesacontributionofdarkfieldelectronholography-2015","author_short":["Boureau, V.","Hÿtch, M.","Daniel, B.","Claverie, A."],"bibdata":{"bibtype":"inproceedings","type":"inproceedings","title":"Process induced strains in FDSOI devices: a contribution of dark-field electron holography","booktitle":"Micro and Nano 2015","author":[{"propositions":[],"lastnames":["Boureau"],"firstnames":["Victor"],"suffixes":[]},{"propositions":[],"lastnames":["Hÿtch"],"firstnames":["Martin"],"suffixes":[]},{"propositions":[],"lastnames":["Daniel"],"firstnames":["Benoit"],"suffixes":[]},{"propositions":[],"lastnames":["Claverie"],"firstnames":["Alain"],"suffixes":[]}],"year":"2015","bibtex":"@inproceedings{boureau_process_2015,\n\ttitle = {Process induced strains in {FDSOI} devices: a contribution of dark-field electron holography},\n\tbooktitle = {Micro and {Nano} 2015},\n\tauthor = {Boureau, Victor and Hÿtch, Martin and Daniel, Benoit and Claverie, Alain},\n\tyear = {2015},\n}\n\n","author_short":["Boureau, V.","Hÿtch, M.","Daniel, B.","Claverie, A."],"key":"boureau_process_2015","id":"boureau_process_2015","bibbaseid":"boureau-htch-daniel-claverie-processinducedstrainsinfdsoidevicesacontributionofdarkfieldelectronholography-2015","role":"author","urls":{},"metadata":{"authorlinks":{}},"html":""},"bibtype":"inproceedings","biburl":"https://bibbase.org/zotero/spintextures","dataSources":["rXHvWQJHcL8ctHS4s"],"keywords":[],"search_terms":["process","induced","strains","fdsoi","devices","contribution","dark","field","electron","holography","boureau","hÿtch","daniel","claverie"],"title":"Process induced strains in FDSOI devices: a contribution of dark-field electron holography","year":2015}