{"_id":"bCnERMNKj5Hva3X3D","bibbaseid":"brunet-kotb-bouscayrol-scheid-andrieux-legros-schammchardon-nanocrystallizedtetragonalmetastablezro2thinfilmsdepositedbymetalorganicchemicalvapordepositionfor3dcapacitorsvol519pg56382011-2012","author_short":["Brunet, M.","Kotb, H. M.","Bouscayrol, L.","Scheid, E.","Andrieux, M.","Legros, C.","Schamm-Chardon, S."],"bibdata":{"bibtype":"article","type":"article","title":"Nanocrystallized tetragonal metastable ZrO2 thin films deposited by metal-organic chemical vapor deposition for 3D capacitors (vol 519, pg 5638, 2011)","volume":"520","issn":"0040-6090","doi":"10.1016/j.tsf.2011.10.009","language":"English","number":"9","journal":"Thin Solid Films","author":[{"propositions":[],"lastnames":["Brunet"],"firstnames":["M."],"suffixes":[]},{"propositions":[],"lastnames":["Kotb"],"firstnames":["H.","Mahfoz"],"suffixes":[]},{"propositions":[],"lastnames":["Bouscayrol"],"firstnames":["L."],"suffixes":[]},{"propositions":[],"lastnames":["Scheid"],"firstnames":["E."],"suffixes":[]},{"propositions":[],"lastnames":["Andrieux"],"firstnames":["M."],"suffixes":[]},{"propositions":[],"lastnames":["Legros"],"firstnames":["C."],"suffixes":[]},{"propositions":[],"lastnames":["Schamm-Chardon"],"firstnames":["S."],"suffixes":[]}],"month":"February","year":"2012","note":"WOS:000301627100052","pages":"3709–3709","bibtex":"@article{brunet_nanocrystallized_2012,\n\ttitle = {Nanocrystallized tetragonal metastable {ZrO2} thin films deposited by metal-organic chemical vapor deposition for {3D} capacitors (vol 519, pg 5638, 2011)},\n\tvolume = {520},\n\tissn = {0040-6090},\n\tdoi = {10.1016/j.tsf.2011.10.009},\n\tlanguage = {English},\n\tnumber = {9},\n\tjournal = {Thin Solid Films},\n\tauthor = {Brunet, M. and Kotb, H. Mahfoz and Bouscayrol, L. and Scheid, E. and Andrieux, M. and Legros, C. and Schamm-Chardon, S.},\n\tmonth = feb,\n\tyear = {2012},\n\tnote = {WOS:000301627100052},\n\tpages = {3709--3709},\n}\n\n","author_short":["Brunet, M.","Kotb, H. M.","Bouscayrol, L.","Scheid, E.","Andrieux, M.","Legros, C.","Schamm-Chardon, S."],"key":"brunet_nanocrystallized_2012","id":"brunet_nanocrystallized_2012","bibbaseid":"brunet-kotb-bouscayrol-scheid-andrieux-legros-schammchardon-nanocrystallizedtetragonalmetastablezro2thinfilmsdepositedbymetalorganicchemicalvapordepositionfor3dcapacitorsvol519pg56382011-2012","role":"author","urls":{},"metadata":{"authorlinks":{}},"html":""},"bibtype":"article","biburl":"https://bibbase.org/zotero/spintextures","dataSources":["rXHvWQJHcL8ctHS4s"],"keywords":[],"search_terms":["nanocrystallized","tetragonal","metastable","zro2","thin","films","deposited","metal","organic","chemical","vapor","deposition","capacitors","vol","519","5638","2011","brunet","kotb","bouscayrol","scheid","andrieux","legros","schamm-chardon"],"title":"Nanocrystallized tetragonal metastable ZrO2 thin films deposited by metal-organic chemical vapor deposition for 3D capacitors (vol 519, pg 5638, 2011)","year":2012}