Nanocrystallized tetragonal metastable ZrO2 thin films deposited by metal-organic chemical vapor deposition for 3D capacitors (vol 519, pg 5638, 2011)

Nanocrystallized tetragonal metastable ZrO2 thin films deposited by metal-organic chemical vapor deposition for 3D capacitors (vol 519, pg 5638, 2011). Brunet, M., Kotb, Mahfoz, H., Bouscayrol, L., Scheid, E., Andrieux, M., Legros, C., & Schamm-Chardon, S. Thin Solid Films, 520(9):3709--3709, February, 2012.
doi bibtex

@article{ brunet_nanocrystallized_2012,
  title = {Nanocrystallized tetragonal metastable {ZrO2} thin films deposited by metal-organic chemical vapor deposition for {3D} capacitors (vol 519, pg 5638, 2011)},
  volume = {520},
  issn = {0040-6090},
  doi = {10.1016/j.tsf.2011.10.009},
  language = {English},
  number = {9},
  journal = {Thin Solid Films},
  author = {Brunet, M. and Kotb, H. Mahfoz and Bouscayrol, L. and Scheid, E. and Andrieux, M. and Legros, C. and Schamm-Chardon, S.},
  month = {February},
  year = {2012},
  pages = {3709--3709}
}

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