Energy efficiency for semiconductor manufacturing facilities. Cohen, R. M. ASHRAE Journal; New York, 45(8):28, August, 2003. ![Energy efficiency for semiconductor manufacturing facilities [link]](https://bibbase.org/img/filetypes/link.svg "link")
Paper bibtex @article{cohen_energy_2003,
title = {Energy efficiency for semiconductor manufacturing facilities},
volume = {45},
copyright = {Copyright American Society of Heating, Refrigeration and Air Conditioning Engineers, Inc. Aug 2003},
issn = {00012491},
url = {https://search.proquest.com/docview/220453673/citation/63E66A87620C415FPQ/1},
language = {English},
number = {8},
urldate = {2019-09-26},
journal = {ASHRAE Journal; New York},
author = {Cohen, Ralph M.},
month = aug,
year = {2003},
pages = {28},
}
Downloads: 0
{"_id":"TzmgSPnb8iAwPKnN9","bibbaseid":"cohen-energyefficiencyforsemiconductormanufacturingfacilities-2003","author_short":["Cohen, R. M."],"bibdata":{"bibtype":"article","type":"article","title":"Energy efficiency for semiconductor manufacturing facilities","volume":"45","copyright":"Copyright American Society of Heating, Refrigeration and Air Conditioning Engineers, Inc. Aug 2003","issn":"00012491","url":"https://search.proquest.com/docview/220453673/citation/63E66A87620C415FPQ/1","language":"English","number":"8","urldate":"2019-09-26","journal":"ASHRAE Journal; New York","author":[{"propositions":[],"lastnames":["Cohen"],"firstnames":["Ralph","M."],"suffixes":[]}],"month":"August","year":"2003","pages":"28","bibtex":"@article{cohen_energy_2003,\n\ttitle = {Energy efficiency for semiconductor manufacturing facilities},\n\tvolume = {45},\n\tcopyright = {Copyright American Society of Heating, Refrigeration and Air Conditioning Engineers, Inc. Aug 2003},\n\tissn = {00012491},\n\turl = {https://search.proquest.com/docview/220453673/citation/63E66A87620C415FPQ/1},\n\tlanguage = {English},\n\tnumber = {8},\n\turldate = {2019-09-26},\n\tjournal = {ASHRAE Journal; New York},\n\tauthor = {Cohen, Ralph M.},\n\tmonth = aug,\n\tyear = {2003},\n\tpages = {28},\n}\n\n","author_short":["Cohen, R. M."],"key":"cohen_energy_2003","id":"cohen_energy_2003","bibbaseid":"cohen-energyefficiencyforsemiconductormanufacturingfacilities-2003","role":"author","urls":{"Paper":"https://search.proquest.com/docview/220453673/citation/63E66A87620C415FPQ/1"},"metadata":{"authorlinks":{}},"html":""},"bibtype":"article","biburl":"https://bibbase.org/zotero/zhuangcq","dataSources":["nLnfxLGHByacJX44C"],"keywords":[],"search_terms":["energy","efficiency","semiconductor","manufacturing","facilities","cohen"],"title":"Energy efficiency for semiconductor manufacturing facilities","year":2003}