Design of Processing Chamber Based on the Flow Uniformity. di Huang, Z.; niu Yang, T.; ming Li, C.; Huang, H.; li Zhang, Q.; and guang Hou, S. In Plödereder, E.; Grunske, L.; Schneider, E.; and Ull, D., editors, GI-Jahrestagung, volume P-232, of LNI, pages 2037-2042, 2014. GI.
Design of Processing Chamber Based on the Flow Uniformity. [link]Link  Design of Processing Chamber Based on the Flow Uniformity. [link]Paper  bibtex   
@inproceedings{conf/gi/HuangYLHZH14,
  added-at = {2018-04-16T00:00:00.000+0200},
  author = {di Huang, Zun and niu Yang, Tie and ming Li, Chang and Huang, Hui and li Zhang, Qi and guang Hou, Shu},
  biburl = {https://www.bibsonomy.org/bibtex/208ac2365eb3113f4573ac15a0efc1337/dblp},
  booktitle = {GI-Jahrestagung},
  crossref = {conf/gi/2014},
  editor = {Plödereder, Erhard and Grunske, Lars and Schneider, Eric and Ull, Dominik},
  ee = {https://dl.gi.de/20.500.12116/2829},
  interhash = {567add24f47686e0a5592ddd4d81c62c},
  intrahash = {08ac2365eb3113f4573ac15a0efc1337},
  isbn = {978-3-88579-626-8},
  keywords = {dblp},
  pages = {2037-2042},
  publisher = {GI},
  series = {LNI},
  timestamp = {2019-11-15T11:56:14.000+0100},
  title = {Design of Processing Chamber Based on the Flow Uniformity.},
  url = {http://dblp.uni-trier.de/db/conf/gi/gi2014.html#HuangYLHZH14},
  volume = {P-232},
  year = 2014
}
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