{"_id":"Y9zkakDfwbXEX56Dq","bibbaseid":"dihuang-niuyang-mingli-huang-lizhang-guanghou-designofprocessingchamberbasedontheflowuniformity-2014","authorIDs":[],"author_short":["di Huang, Z.","niu Yang, T.","ming Li, C.","Huang, H.","li Zhang, Q.","guang Hou, S."],"bibdata":{"bibtype":"inproceedings","type":"inproceedings","added-at":"2018-04-16T00:00:00.000+0200","author":[{"propositions":["di"],"lastnames":["Huang"],"firstnames":["Zun"],"suffixes":[]},{"propositions":["niu"],"lastnames":["Yang"],"firstnames":["Tie"],"suffixes":[]},{"propositions":["ming"],"lastnames":["Li"],"firstnames":["Chang"],"suffixes":[]},{"propositions":[],"lastnames":["Huang"],"firstnames":["Hui"],"suffixes":[]},{"propositions":["li"],"lastnames":["Zhang"],"firstnames":["Qi"],"suffixes":[]},{"propositions":["guang"],"lastnames":["Hou"],"firstnames":["Shu"],"suffixes":[]}],"biburl":"https://www.bibsonomy.org/bibtex/208ac2365eb3113f4573ac15a0efc1337/dblp","booktitle":"GI-Jahrestagung","crossref":"conf/gi/2014","editor":[{"propositions":[],"lastnames":["Plödereder"],"firstnames":["Erhard"],"suffixes":[]},{"propositions":[],"lastnames":["Grunske"],"firstnames":["Lars"],"suffixes":[]},{"propositions":[],"lastnames":["Schneider"],"firstnames":["Eric"],"suffixes":[]},{"propositions":[],"lastnames":["Ull"],"firstnames":["Dominik"],"suffixes":[]}],"ee":"https://dl.gi.de/20.500.12116/2829","interhash":"567add24f47686e0a5592ddd4d81c62c","intrahash":"08ac2365eb3113f4573ac15a0efc1337","isbn":"978-3-88579-626-8","keywords":"dblp","pages":"2037-2042","publisher":"GI","series":"LNI","timestamp":"2019-11-15T11:56:14.000+0100","title":"Design of Processing Chamber Based on the Flow Uniformity.","url":"http://dblp.uni-trier.de/db/conf/gi/gi2014.html#HuangYLHZH14","volume":"P-232","year":"2014","bibtex":"@inproceedings{conf/gi/HuangYLHZH14,\n added-at = {2018-04-16T00:00:00.000+0200},\n author = {di Huang, Zun and niu Yang, Tie and ming Li, Chang and Huang, Hui and li Zhang, Qi and guang Hou, Shu},\n biburl = {https://www.bibsonomy.org/bibtex/208ac2365eb3113f4573ac15a0efc1337/dblp},\n booktitle = {GI-Jahrestagung},\n crossref = {conf/gi/2014},\n editor = {Plödereder, Erhard and Grunske, Lars and Schneider, Eric and Ull, Dominik},\n ee = {https://dl.gi.de/20.500.12116/2829},\n interhash = {567add24f47686e0a5592ddd4d81c62c},\n intrahash = {08ac2365eb3113f4573ac15a0efc1337},\n isbn = {978-3-88579-626-8},\n keywords = {dblp},\n pages = {2037-2042},\n publisher = {GI},\n series = {LNI},\n timestamp = {2019-11-15T11:56:14.000+0100},\n title = {Design of Processing Chamber Based on the Flow Uniformity.},\n url = {http://dblp.uni-trier.de/db/conf/gi/gi2014.html#HuangYLHZH14},\n volume = {P-232},\n year = 2014\n}\n\n","author_short":["di Huang, Z.","niu Yang, T.","ming Li, C.","Huang, H.","li Zhang, Q.","guang Hou, S."],"editor_short":["Plödereder, E.","Grunske, L.","Schneider, E.","Ull, D."],"key":"conf/gi/HuangYLHZH14","id":"conf/gi/HuangYLHZH14","bibbaseid":"dihuang-niuyang-mingli-huang-lizhang-guanghou-designofprocessingchamberbasedontheflowuniformity-2014","role":"author","urls":{"Link":"https://dl.gi.de/20.500.12116/2829","Paper":"http://dblp.uni-trier.de/db/conf/gi/gi2014.html#HuangYLHZH14"},"keyword":["dblp"],"downloads":0},"bibtype":"inproceedings","biburl":"http://www.bibsonomy.org/bib/author/Chang Li?items=1000","creationDate":"2020-03-18T03:31:20.752Z","downloads":0,"keywords":["dblp"],"search_terms":["design","processing","chamber","based","flow","uniformity","di huang","niu yang","ming li","huang","li zhang","guang hou"],"title":"Design of Processing Chamber Based on the Flow Uniformity.","year":2014,"dataSources":["csw6JBpYFS5SMxH93"]}