Characterization of an analytical electron microscope with a NiO test specimen. Egerton, R. F. & Cheng, S. C. Ultramicroscopy, 55(1):43–54, 1994. 00027Paper doi abstract bibtex We show how an easily fabricated test specimen, consisting of a thin film of nickel oxide supported on a molybdenum grid, can be used for quantitative evaluation of a transmission electron microscope fitted with an energy-dispersive X-ray spectrometer. The support grid contributes additional background and characteristic peaks to the EDX spectrum, providing a quantitative measure of stray X-rays and electrons present in the microscope column. Because it takes into account electron scattering in the specimen, this measurement provides more realistic information about system contributions than a traditional “hole count” test. The NiO specimen can also be used to measure the solid angle of the EDX detector, its efficiency at low photon energies and other system parameters. We present results for a germanium low-Z atmospheric-window detector attached to a JEOL-2010 microscope.
@article{egerton_characterization_1994,
title = {Characterization of an analytical electron microscope with a {NiO} test specimen},
volume = {55},
issn = {0304-3991},
url = {http://www.sciencedirect.com/science/article/pii/0304399194900795},
doi = {10.1016/0304-3991(94)90079-5},
abstract = {We show how an easily fabricated test specimen, consisting of a thin film of nickel oxide supported on a molybdenum grid, can be used for quantitative evaluation of a transmission electron microscope fitted with an energy-dispersive X-ray spectrometer. The support grid contributes additional background and characteristic peaks to the EDX spectrum, providing a quantitative measure of stray X-rays and electrons present in the microscope column. Because it takes into account electron scattering in the specimen, this measurement provides more realistic information about system contributions than a traditional “hole count” test. The NiO specimen can also be used to measure the solid angle of the EDX detector, its efficiency at low photon energies and other system parameters. We present results for a germanium low-Z atmospheric-window detector attached to a JEOL-2010 microscope.},
number = {1},
urldate = {2014-02-03},
journal = {Ultramicroscopy},
author = {Egerton, R. F. and Cheng, S. C.},
year = {1994},
note = {00027},
pages = {43--54},
}
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