Thin-film piezoelectric MEMS. Eom, C. & Trolier-McKinstry, S. MRS BULLETIN, 37(11):1007-1021, NOV, 2012. doi abstract bibtex Major challenges have emerged as microelectromechanical systems (MEMS) move to smaller size and increased integration density, while requiring fast response and large motions. Continued scaling to nanoelectromechanical systems (NEMS) requires revolutionary advances in actuators, sensors, and transducers. MEMS and NEMS utilizing piezoelectric thin films provide the required large linear forces with fast actuation at small drive voltages. This, in turn, provides accurate displacements at high integration densities, reduces the voltage burden on the integrated control electronics, and decreases NEMS complexity. These advances are enabled by the rapidly growing field of thin-film piezoelectric MEMS, from the development of AlN films for resonator and filter applications, to their implementation in adaptive radio front ends, to the demonstration of large piezoelectricity in epitaxial Pb(Zr,Ti)O-3 and PbMg1/3Nb2/3O3-PbTiO3 thin films. Applications of low voltage MEMS/NEMS include transducers for ultrasound medical imaging, robotic insects, inkjet printing, mechanically based logic, and energy harvesting. As described in this article, advances in the field are being driven by and are prompting advances in heterostructure design and theoretical investigations.
@article{ ISI:000311050200013,
Author = {Eom, Chang-Beom and Trolier-McKinstry, Susan},
Title = {{Thin-film piezoelectric MEMS}},
Journal = {{MRS BULLETIN}},
Year = {{2012}},
Volume = {{37}},
Number = {{11}},
Pages = {{1007-1021}},
Month = {{NOV}},
Abstract = {{Major challenges have emerged as microelectromechanical systems (MEMS)
move to smaller size and increased integration density, while requiring
fast response and large motions. Continued scaling to
nanoelectromechanical systems (NEMS) requires revolutionary advances in
actuators, sensors, and transducers. MEMS and NEMS utilizing
piezoelectric thin films provide the required large linear forces with
fast actuation at small drive voltages. This, in turn, provides accurate
displacements at high integration densities, reduces the voltage burden
on the integrated control electronics, and decreases NEMS complexity.
These advances are enabled by the rapidly growing field of thin-film
piezoelectric MEMS, from the development of AlN films for resonator and
filter applications, to their implementation in adaptive radio front
ends, to the demonstration of large piezoelectricity in epitaxial
Pb(Zr,Ti)O-3 and PbMg1/3Nb2/3O3-PbTiO3 thin films. Applications of low
voltage MEMS/NEMS include transducers for ultrasound medical imaging,
robotic insects, inkjet printing, mechanically based logic, and energy
harvesting. As described in this article, advances in the field are
being driven by and are prompting advances in heterostructure design and
theoretical investigations.}},
DOI = {{10.1557/mrs.2012.273}},
ISSN = {{0883-7694}},
EISSN = {{1938-1425}},
ResearcherID-Numbers = {{Eom, Chang-Beom/I-5567-2014
}},
ORCID-Numbers = {{Trolier-McKinstry, Susan/0000-0002-7267-9281}},
Unique-ID = {{ISI:000311050200013}},
}
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{"_id":"BL857ZFAzGrSBBbKc","bibbaseid":"eom-troliermckinstry-thinfilmpiezoelectricmems-2012","downloads":0,"creationDate":"2018-09-17T23:43:09.368Z","title":"Thin-film piezoelectric MEMS","author_short":["Eom, C.","Trolier-McKinstry, S."],"year":2012,"bibtype":"article","biburl":"http://oxide.engr.wisc.edu/newWebsite/papers/oxide.bib","bibdata":{"bibtype":"article","type":"article","author":[{"propositions":[],"lastnames":["Eom"],"firstnames":["Chang-Beom"],"suffixes":[]},{"propositions":[],"lastnames":["Trolier-McKinstry"],"firstnames":["Susan"],"suffixes":[]}],"title":"Thin-film piezoelectric MEMS","journal":"MRS BULLETIN","year":"2012","volume":"37","number":"11","pages":"1007-1021","month":"NOV","abstract":"Major challenges have emerged as microelectromechanical systems (MEMS) move to smaller size and increased integration density, while requiring fast response and large motions. Continued scaling to nanoelectromechanical systems (NEMS) requires revolutionary advances in actuators, sensors, and transducers. MEMS and NEMS utilizing piezoelectric thin films provide the required large linear forces with fast actuation at small drive voltages. This, in turn, provides accurate displacements at high integration densities, reduces the voltage burden on the integrated control electronics, and decreases NEMS complexity. These advances are enabled by the rapidly growing field of thin-film piezoelectric MEMS, from the development of AlN films for resonator and filter applications, to their implementation in adaptive radio front ends, to the demonstration of large piezoelectricity in epitaxial Pb(Zr,Ti)O-3 and PbMg1/3Nb2/3O3-PbTiO3 thin films. Applications of low voltage MEMS/NEMS include transducers for ultrasound medical imaging, robotic insects, inkjet printing, mechanically based logic, and energy harvesting. As described in this article, advances in the field are being driven by and are prompting advances in heterostructure design and theoretical investigations.","doi":"10.1557/mrs.2012.273","issn":"0883-7694","eissn":"1938-1425","researcherid-numbers":"Eom, Chang-Beom/I-5567-2014 ","orcid-numbers":"Trolier-McKinstry, Susan/0000-0002-7267-9281","unique-id":"ISI:000311050200013","bibtex":"@article{ ISI:000311050200013,\nAuthor = {Eom, Chang-Beom and Trolier-McKinstry, Susan},\nTitle = {{Thin-film piezoelectric MEMS}},\nJournal = {{MRS BULLETIN}},\nYear = {{2012}},\nVolume = {{37}},\nNumber = {{11}},\nPages = {{1007-1021}},\nMonth = {{NOV}},\nAbstract = {{Major challenges have emerged as microelectromechanical systems (MEMS)\n move to smaller size and increased integration density, while requiring\n fast response and large motions. Continued scaling to\n nanoelectromechanical systems (NEMS) requires revolutionary advances in\n actuators, sensors, and transducers. MEMS and NEMS utilizing\n piezoelectric thin films provide the required large linear forces with\n fast actuation at small drive voltages. This, in turn, provides accurate\n displacements at high integration densities, reduces the voltage burden\n on the integrated control electronics, and decreases NEMS complexity.\n These advances are enabled by the rapidly growing field of thin-film\n piezoelectric MEMS, from the development of AlN films for resonator and\n filter applications, to their implementation in adaptive radio front\n ends, to the demonstration of large piezoelectricity in epitaxial\n Pb(Zr,Ti)O-3 and PbMg1/3Nb2/3O3-PbTiO3 thin films. Applications of low\n voltage MEMS/NEMS include transducers for ultrasound medical imaging,\n robotic insects, inkjet printing, mechanically based logic, and energy\n harvesting. As described in this article, advances in the field are\n being driven by and are prompting advances in heterostructure design and\n theoretical investigations.}},\nDOI = {{10.1557/mrs.2012.273}},\nISSN = {{0883-7694}},\nEISSN = {{1938-1425}},\nResearcherID-Numbers = {{Eom, Chang-Beom/I-5567-2014\n }},\nORCID-Numbers = {{Trolier-McKinstry, Susan/0000-0002-7267-9281}},\nUnique-ID = {{ISI:000311050200013}},\n}\n\n","author_short":["Eom, C.","Trolier-McKinstry, S."],"key":"ISI:000311050200013","id":"ISI:000311050200013","bibbaseid":"eom-troliermckinstry-thinfilmpiezoelectricmems-2012","role":"author","urls":{},"downloads":0,"html":""},"search_terms":["thin","film","piezoelectric","mems","eom","trolier-mckinstry"],"keywords":[],"authorIDs":[],"dataSources":["zArY7xMz8KdDswhhx"]}