Sputtered Ge-Si heteroepitaxial thin films for photodetection in third window. Feré, M., Lanata, M., Piccinin, D., Pietralunga, S., M., Zappettini, A., Ossi, P., M., & Martinelli, M. In 2008 5th International Conference on Group IV Photonics, GFP, pages 270-272, 2008. IEEE. Website doi abstract bibtex DC-pulsed magnetron sputtering (PMS) allows to produce heteroepitaxial p-type Germanium thin films on 6rdquo Silicon wafers. Integrated p-n photodiodes, based on DC-PMS deposited Ge/Si heterojunctions, feature flat responsivity over the whole third communication window.
@inproceedings{
title = {Sputtered Ge-Si heteroepitaxial thin films for photodetection in third window},
type = {inproceedings},
year = {2008},
pages = {270-272},
websites = {http://www.scopus.com/inward/record.url?eid=2-s2.0-56249083887&partnerID=tZOtx3y1},
publisher = {IEEE},
id = {5735ca4a-a969-3a04-b576-513f3316313f},
created = {2016-04-12T13:14:34.000Z},
accessed = {2016-04-12},
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last_modified = {2017-03-14T11:27:23.071Z},
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citation_key = {Fere2008},
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abstract = {DC-pulsed magnetron sputtering (PMS) allows to produce heteroepitaxial <i>p</i>-type Germanium thin films on 6rdquo Silicon wafers. Integrated <i>p</i>-<i>n</i> photodiodes, based on DC-PMS deposited Ge/Si heterojunctions, feature flat responsivity over the whole third communication window.},
bibtype = {inproceedings},
author = {Feré, Massimo and Lanata, Marta and Piccinin, Davide and Pietralunga, Silvia M. and Zappettini, Andrea and Ossi, Paolo M. and Martinelli, Mario},
doi = {10.1109/GROUP4.2008.4638169},
booktitle = {2008 5th International Conference on Group IV Photonics, GFP}
}
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