@article{ferro_2017_j.tsf.2016.11.045,
  author = {G. Ferro and M. Chubarov and F. Mercier and S. Lay and F. Charlot and A. Crisci and S. Coindeau and T. Encinas and R. Reboud and R. Boichot},
  doi = {10.1016/j.tsf.2016.11.045},
  journal = {Thin Solid Films},
  pages = {65 - 71},
  publisher = {{Elsevier}},
  title = {Growth of aluminum nitride on flat and patterned Si (111) by high temperature halide CVD},
  url = {https://hal.archives-ouvertes.fr/hal-01615193},
  volume = {623},
  year = {2017},
  number = {},
  booktitle = {},
}

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