@article{ferro_2017_pssa.201600454,
  author = {G. Ferro and S. Sejil and M. Lazar and D. Carole and C. Brylinski and D. Planson and C. Raynaud},
  doi = {10.1002/pssa.201600454},
  journal = {Physica Status Solidi (a)},
  number = {4},
  publisher = {{Wiley}},
  title = {Further optimization of VLS localized epitaxy for deeper 4H-SiC p-n junctions},
  url = {https://hal.archives-ouvertes.fr/hal-01615190},
  volume = {214},
  year = {2017},
  booktitle = {},
  pages = {},
}

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