Spontaneously generated sinusoidallike structures on Ti???Ni thin film under focused ion-beam bombardment. Fu, Y. & Bryan, N. Optics Express, 12(16):3707--3712, 2004. Paper doi abstract bibtex A new fabrication method for a sinusoidallike structure is described. The sinusoidal structure can be spontaneously self-formed on the surface of a substrate by focused ion-beam bombardment with raster scanning and an ion incident angle perpendicular to the sample surface (normal incidence). The substrate material is a silicon wafer coated with 2-μm-thick Ti�??Ni thin film. We show by measurement and analysis of the grating characteristics at the working wavelength range from 50 to 1500 nm that the technique of self-organized formation is a valid approach for microfabrication of diffractive structures, and the spontaneously generated structure under ion bombardment is applicable for a sinusoidal grating that functions from the ultraviolet to the near-infrared wavelength range.
@article{fu_spontaneously_2004,
title = {Spontaneously generated sinusoidallike structures on {Ti}???{Ni} thin film under focused ion-beam bombardment},
volume = {12},
shorttitle = {Spontaneously generated sinusoidallike structures on {Ti}?},
url = {http://www.opticsexpress.org/abstract.cfm?URI=oe-12-16-3707},
doi = {10.1364/OPEX.12.003707},
abstract = {A new fabrication method for a sinusoidallike structure is described. The sinusoidal structure can be spontaneously self-formed on the surface of a substrate by focused ion-beam bombardment with raster scanning and an ion incident angle perpendicular to the sample surface (normal incidence). The substrate material is a silicon wafer coated with 2-μm-thick Ti�??Ni thin film. We show by measurement and analysis of the grating characteristics at the working wavelength range from 50 to 1500 nm that the technique of self-organized formation is a valid approach for microfabrication of diffractive structures, and the spontaneously generated structure under ion bombardment is applicable for a sinusoidal grating that functions from the ultraviolet to the near-infrared wavelength range.},
number = {16},
urldate = {2011-01-17TZ},
journal = {Optics Express},
author = {Fu, Yongqi and Bryan, Ngoi},
year = {2004},
keywords = {Diffraction and gratings, Diffractive optics, Infrared, Optical design and fabrication},
pages = {3707--3712}
}
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