@inproceedings{ dblp1783262,
  title = {Discussion and analysis of Au/a-Si contact resistance in MEMS/NEMS devices},
  author = {Fengshan Fu and Fang Yang and Wei Wang and Xian Huang and Jun He and Li Zhang and Taotao Guan and Rui Li and Dacheng Zhang},
  author_short = {Fu, F. and Yang, F. and Wang, W. and Huang, X. and He, J. and Zhang, L. and Guan, T. and Li, R. and Zhang, D.},
  bibtype = {inproceedings},
  type = {inproceedings},
  year = {2015},
  key = {dblp1783262},
  id = {dblp1783262},
  biburl = {http://www.dblp.org/rec/bibtex/conf/nems/FuYWHHZGLZ15},
  url = {http://dx.doi.org/10.1109/NEMS.2015.7147499},
  conference = {NEMS},
  pages = {593-596},
  text = {NEMS 2015:593-596},
  booktitle = {Proceedings of Nano/Micro Engineered and Molecular Systems (NEMS)}
}

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