@article{ fuchs_is_1983,
  title = {{IS} {THE} {IMPACT} {VELOCITY} {OF} {VACUUM}-{DEPOSITED} {ATOMS} {OF} {SIGNIFICANCE} {FOR} {THE} {FILM} {STRUCTURE}},
  volume = {101},
  issn = {0040-6090},
  doi = {10.1016/0040-6090(83)90492-3},
  number = {1},
  journal = {Thin Solid Films},
  author = {FUCHS, H. and GLEITER, H.},
  year = {1983},
  note = {{WOS}:A1983QJ72900006},
  pages = {55--59}
}

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