Three-dimensional deep sub-diffraction optical beam lithography with 9 nm feature size. Gan, Z., Cao, Y., Evans, R. A., & Gu, M. Nature Communications, June, 2013.
Paper doi bibtex @article{gan_three-dimensional_2013,
title = {Three-dimensional deep sub-diffraction optical beam lithography with 9 nm feature size},
volume = {4},
issn = {2041-1723},
url = {http://www.nature.com/doifinder/10.1038/ncomms3061},
doi = {10.1038/ncomms3061},
urldate = {2015-06-01TZ},
journal = {Nature Communications},
author = {Gan, Zongsong and Cao, Yaoyu and Evans, Richard A. and Gu, Min},
month = jun,
year = {2013}
}
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