Three-dimensional deep sub-diffraction optical beam lithography with 9 nm feature size

Three-dimensional deep sub-diffraction optical beam lithography with 9 nm feature size. Gan, Z., Cao, Y., Evans, R. A., & Gu, M. Nature Communications, June, 2013.
$Three-dimensional deep sub-diffraction optical beam lithography with 9 nm feature size [link]$ Paper doi bibtex

@article{gan_three-dimensional_2013,
	title = {Three-dimensional deep sub-diffraction optical beam lithography with 9 nm feature size},
	volume = {4},
	issn = {2041-1723},
	url = {http://www.nature.com/doifinder/10.1038/ncomms3061},
	doi = {10.1038/ncomms3061},
	urldate = {2015-06-01TZ},
	journal = {Nature Communications},
	author = {Gan, Zongsong and Cao, Yaoyu and Evans, Richard A. and Gu, Min},
	month = jun,
	year = {2013}
}

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