@article{gatesman_anti-reflection_2000,
	title = {An anti-reflection coating for silicon optics at terahertz frequencies},
	volume = {10},
	issn = {1051-8207 VO - 10},
	doi = {10.1109/75.856983},
	abstract = {A method for reducing the reflections from silicon optics at
terahertz frequencies has been investigated. In this study, we used thin
films of parylene as an anti-reflection (AR) layer for silicon optics
and show low-loss behavior well above 1 THz. Transmittance spectra are
acquired on double-sided-parylene-coated, high-resistivity,
single-crystal silicon etalons between 0.45 THz and 2.8 THz. Modeling
the optical behavior of the three-layer system allowed for the
determination of the refractive index and absorption coefficient of
parylene at these frequencies. Our data indicate a refractive index, n,
of 1.62 for parylene C and parylene D, and a reasonably modest
absorption coefficient make these materials a suitable AR coating for
silicon at terahertz frequencies. Coatings sufficiently thick for AR
performance reduced the average transmittance of the three-layer system
by \<10\% compared to a lossless AR coating with an ideal refractive
index},
	number = {7},
	journal = {IEEE Microwave and Guided Wave Letters},
	author = {Gatesman, a.J. and Waldman, J. and Ji, M. and Musante, C. and Yagvesson, S.},
	year = {2000},
	pages = {264--266},
}

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