Assessment of engineered surfaces roughness by high-resolution 3D SEM photogrammetry. Gontard, L., López-Castro, J., González-Rovira, L., Vázquez-Martínez, J., Varela-Feria, F., Marcos, M., & Calvino, J. Ultramicroscopy, 177:106-114, 2017. cited By 10
Assessment of engineered surfaces roughness by high-resolution 3D SEM photogrammetry [link]Paper  doi  abstract   bibtex   
We describe a methodology to obtain three-dimensional models of engineered surfaces using scanning electron microscopy and multi-view photogrammetry (3DSEM). For the reconstruction of the 3D models of the surfaces we used freeware available in the cloud. The method was applied to study the surface roughness of metallic samples patterned with parallel grooves by means of laser. The results are compared with measurements obtained using stylus profilometry (PR) and SEM stereo-photogrammetry (SP). The application of 3DSEM is more time demanding than PR or SP, but it provides a more accurate representation of the surfaces. The results obtained with the three techniques are compared by investigating the influence of sampling step on roughness parameters. © 2017 Elsevier B.V.
@ARTICLE{Gontard2017106,
author={Gontard, L.C. and López-Castro, J.D. and González-Rovira, L. and Vázquez-Martínez, J.M. and Varela-Feria, F.M. and Marcos, M. and Calvino, J.J.},
title={Assessment of engineered surfaces roughness by high-resolution 3D SEM photogrammetry},
journal={Ultramicroscopy},
year={2017},
volume={177},
pages={106-114},
doi={10.1016/j.ultramic.2017.03.007},
note={cited By 10},
url={https://www.scopus.com/inward/record.uri?eid=2-s2.0-85015763784&doi=10.1016%2fj.ultramic.2017.03.007&partnerID=40&md5=f4944bfa5e984fb13ffe9873a410b39c},
abstract={We describe a methodology to obtain three-dimensional models of engineered surfaces using scanning electron microscopy and multi-view photogrammetry (3DSEM). For the reconstruction of the 3D models of the surfaces we used freeware available in the cloud. The method was applied to study the surface roughness of metallic samples patterned with parallel grooves by means of laser. The results are compared with measurements obtained using stylus profilometry (PR) and SEM stereo-photogrammetry (SP). The application of 3DSEM is more time demanding than PR or SP, but it provides a more accurate representation of the surfaces. The results obtained with the three techniques are compared by investigating the influence of sampling step on roughness parameters. © 2017 Elsevier B.V.},
keywords={Photogrammetry;  Profilometry;  Scanning electron microscopy;  Three dimensional computer graphics, 3DSEM;  Engineered surfaces;  Patterned surface;  Roughness parameters;  SEM metrology;  Stereophotogrammetry;  Stylus profilometry;  Three-dimensional model, Surface roughness, 3D scanning electron microscopy;  analytic method;  Article;  controlled study;  image reconstruction;  intermethod comparison;  laser;  measurement accuracy;  photogrammetry;  physical parameters;  reliability;  roughness;  sampling;  scanning electron microscopy;  stereophotogrammetry;  surface property},
document_type={Article},
source={Scopus},
}

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