@article{journals/jzusc/HanFLLL13,
  added-at = {2016-12-31T00:00:00.000+0100},
  author = {Han, Jianqiang and sheng Feng, Ri and Li, Yan and lin Li, Sen and Li, Qing},
  biburl = {https://www.bibsonomy.org/bibtex/2bf48233bc844c700f3997297cb021994/dblp},
  ee = {http://dx.doi.org/10.1631/jzus.C1200251},
  interhash = {5870fd3c5b8c1030b4be455549f53d66},
  intrahash = {bf48233bc844c700f3997297cb021994},
  journal = {Journal of Zhejiang University - Science C},
  keywords = {dblp},
  number = 1,
  pages = {65-74},
  timestamp = {2017-01-03T11:33:42.000+0100},
  title = {Microfabrication technology for non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers.},
  url = {http://dblp.uni-trier.de/db/journals/jzusc/jzusc14.html#HanFLLL13},
  volume = 14,
  year = 2013
}

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