@phdthesis{hecht1979abscheidung,
  added-at = {2016-05-31T05:58:08.000+0200},
  author = {Hecht, Günther},
  biburl = {https://www.bibsonomy.org/bibtex/2612e6bd84eaf1efbde87d01b4fd3aff0/genealogie},
  dnbtitleid = {810556502},
  interhash = {169b76814c55566ccf110ee8f44e02da},
  intrahash = {612e6bd84eaf1efbde87d01b4fd3aff0},
  keywords = {Naturwissenschaften dnb},
  school = {TU Chemnitz},
  timestamp = {2016-05-31T05:58:08.000+0200},
  title = {Zur Abscheidung von Halbleiterschichten mittels Ionenverfahren},
  type = {habilitation},
  year = 1979
}

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