Helium ion microscopy. Hlawacek, G., Veligura, V., van Gastel, R., & Poelsema, B. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 32(2):020801, 3, 2014. Paper Website abstract bibtex Helium Ion Microcopy (HIM) based on Gas Field Ion Sources (GFIS) represents a new ultra high resolution microscopy and nano-fabrication technique. It is an enabling technology that not only provides imagery of conducting as well as uncoated insulating nano-structures but also allows to create these features. The latter can be achieved using resists or material removal due to sputtering. The close to free-form sculpting of structures over several length scales has been made possible by the extension of the method to other gases such as Neon. A brief introduction of the underlying physics as well as a broad review of the applicability of the method is presented in this review.
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title = {Helium ion microscopy},
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notes = {<b>From Duplicate 2 ( </b><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><b><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/></b><br/><br/><br/><br/><br/><br/><br/><b><br/><br/><br/><br/><br/><br/><br/></b><br/><br/><br/><b><br/><br/><br/></b><br/><b><br/><i>Helium ion microscopy</i><br/></b><br/><b><br/><br/><br/></b><br/><br/><br/><b><br/><br/><br/><br/><br/><br/><br/></b><br/><br/><br/><br/><br/><br/><br/><b><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/></b><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><b>- Hlawacek, Gregor; Veligura, Vasilisa; van Gastel, Raoul; Poelsema, Bene )<br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/></b><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><b>From Duplicate 2 ( </b><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><b><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/></b><br/><br/><br/><br/><br/><br/><br/><b><br/><br/><br/><br/><br/><br/><br/></b><br/><br/><br/><b><br/><br/><br/></b><br/><b><br/><i>Helium Ion Microscopy</i><br/></b><br/><b><br/><br/><br/></b><br/><br/><br/><b><br/><br/><br/><br/><br/><br/><br/></b><br/><br/><br/><br/><br/><br/><br/><b><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/></b><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><b>- Hlawacek, Gregor; Veligura, Vasilisa; Gastel, Raoul Van; Poelsema, Bene )<br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/></b><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/>invited review; submitted to J. Vac. Sci. Tech. B},
abstract = {Helium Ion Microcopy (HIM) based on Gas Field Ion Sources (GFIS) represents a new ultra high resolution microscopy and nano-fabrication technique. It is an enabling technology that not only provides imagery of conducting as well as uncoated insulating nano-structures but also allows to create these features. The latter can be achieved using resists or material removal due to sputtering. The close to free-form sculpting of structures over several length scales has been made possible by the extension of the method to other gases such as Neon. A brief introduction of the underlying physics as well as a broad review of the applicability of the method is presented in this review.},
bibtype = {article},
author = {Hlawacek, Gregor and Veligura, Vasilisa and van Gastel, Raoul and Poelsema, Bene},
journal = {Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures},
number = {2}
}
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{"_id":{"_str":"534ae42386fcaed03b000657"},"__v":8,"authorIDs":["54e6e441cbc9e4a063000509"],"author_short":["Hlawacek, G.","Veligura, V.","van Gastel, R.","Poelsema, B."],"bibbaseid":"hlawacek-veligura-vangastel-poelsema-heliumionmicroscopy-2014","bibdata":{"title":"Helium ion microscopy","type":"article","year":"2014","identifiers":"[object Object]","pages":"020801","volume":"32","websites":"http://scitation.aip.org/content/avs/journal/jvstb/32/2/10.1116/1.4863676","month":"3","id":"21ab849c-df01-3b99-9b08-d6b9ffac154d","created":"2013-11-08T03:46:36.000Z","accessed":"2014-07-21","file_attached":"true","profile_id":"78b6d3f1-1bc3-3383-82b0-f5d02daa98a6","last_modified":"2017-03-10T15:48:51.694Z","tags":"him","read":"true","starred":false,"authored":"true","confirmed":"true","hidden":false,"citation_key":"Hlawacek2013c","notes":"<b>From Duplicate 2 ( </b><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><b><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/></b><br/><br/><br/><br/><br/><br/><br/><b><br/><br/><br/><br/><br/><br/><br/></b><br/><br/><br/><b><br/><br/><br/></b><br/><b><br/><i>Helium ion microscopy</i><br/></b><br/><b><br/><br/><br/></b><br/><br/><br/><b><br/><br/><br/><br/><br/><br/><br/></b><br/><br/><br/><br/><br/><br/><br/><b><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/></b><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><b>- Hlawacek, Gregor; Veligura, Vasilisa; van Gastel, Raoul; Poelsema, Bene )<br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/></b><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><b>From Duplicate 2 ( </b><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><b><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/></b><br/><br/><br/><br/><br/><br/><br/><b><br/><br/><br/><br/><br/><br/><br/></b><br/><br/><br/><b><br/><br/><br/></b><br/><b><br/><i>Helium Ion Microscopy</i><br/></b><br/><b><br/><br/><br/></b><br/><br/><br/><b><br/><br/><br/><br/><br/><br/><br/></b><br/><br/><br/><br/><br/><br/><br/><b><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/></b><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><b>- Hlawacek, Gregor; Veligura, Vasilisa; Gastel, Raoul Van; Poelsema, Bene )<br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/></b><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/>invited review; submitted to J. Vac. Sci. Tech. B","abstract":"Helium Ion Microcopy (HIM) based on Gas Field Ion Sources (GFIS) represents a new ultra high resolution microscopy and nano-fabrication technique. It is an enabling technology that not only provides imagery of conducting as well as uncoated insulating nano-structures but also allows to create these features. The latter can be achieved using resists or material removal due to sputtering. The close to free-form sculpting of structures over several length scales has been made possible by the extension of the method to other gases such as Neon. A brief introduction of the underlying physics as well as a broad review of the applicability of the method is presented in this review.","bibtype":"article","author":"Hlawacek, Gregor and Veligura, Vasilisa and van Gastel, Raoul and Poelsema, Bene","journal":"Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures","number":"2","bibtex":"@article{\n title = {Helium ion microscopy},\n type = {article},\n year = {2014},\n identifiers = {[object Object]},\n pages = {020801},\n volume = {32},\n websites = {http://scitation.aip.org/content/avs/journal/jvstb/32/2/10.1116/1.4863676},\n month = {3},\n id = {21ab849c-df01-3b99-9b08-d6b9ffac154d},\n created = {2013-11-08T03:46:36.000Z},\n accessed = {2014-07-21},\n file_attached = {true},\n profile_id = {78b6d3f1-1bc3-3383-82b0-f5d02daa98a6},\n last_modified = {2017-03-10T15:48:51.694Z},\n tags = {him},\n read = {true},\n starred = {false},\n authored = {true},\n confirmed = {true},\n hidden = {false},\n citation_key = {Hlawacek2013c},\n notes = {<b>From Duplicate 2 ( </b><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><b><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/></b><br/><br/><br/><br/><br/><br/><br/><b><br/><br/><br/><br/><br/><br/><br/></b><br/><br/><br/><b><br/><br/><br/></b><br/><b><br/><i>Helium ion microscopy</i><br/></b><br/><b><br/><br/><br/></b><br/><br/><br/><b><br/><br/><br/><br/><br/><br/><br/></b><br/><br/><br/><br/><br/><br/><br/><b><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/></b><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><b>- Hlawacek, Gregor; Veligura, Vasilisa; van Gastel, Raoul; Poelsema, Bene )<br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/></b><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><b>From Duplicate 2 ( </b><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><b><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/></b><br/><br/><br/><br/><br/><br/><br/><b><br/><br/><br/><br/><br/><br/><br/></b><br/><br/><br/><b><br/><br/><br/></b><br/><b><br/><i>Helium Ion Microscopy</i><br/></b><br/><b><br/><br/><br/></b><br/><br/><br/><b><br/><br/><br/><br/><br/><br/><br/></b><br/><br/><br/><br/><br/><br/><br/><b><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/></b><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><b>- Hlawacek, Gregor; Veligura, Vasilisa; Gastel, Raoul Van; Poelsema, Bene )<br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/></b><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/><br/>invited review; submitted to J. Vac. Sci. Tech. B},\n abstract = {Helium Ion Microcopy (HIM) based on Gas Field Ion Sources (GFIS) represents a new ultra high resolution microscopy and nano-fabrication technique. It is an enabling technology that not only provides imagery of conducting as well as uncoated insulating nano-structures but also allows to create these features. The latter can be achieved using resists or material removal due to sputtering. The close to free-form sculpting of structures over several length scales has been made possible by the extension of the method to other gases such as Neon. A brief introduction of the underlying physics as well as a broad review of the applicability of the method is presented in this review.},\n bibtype = {article},\n author = {Hlawacek, Gregor and Veligura, Vasilisa and van Gastel, Raoul and Poelsema, Bene},\n journal = {Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures},\n number = {2}\n}","author_short":["Hlawacek, G.","Veligura, V.","van Gastel, R.","Poelsema, B."],"urls":{"Paper":"http://bibbase.org/service/mendeley/78b6d3f1-1bc3-3383-82b0-f5d02daa98a6/file/44c5d6fd-5b33-d279-382b-a97c564ecf29/2014-Helium_ion_microscopy.pdf.pdf","Website":"http://scitation.aip.org/content/avs/journal/jvstb/32/2/10.1116/1.4863676"},"bibbaseid":"hlawacek-veligura-vangastel-poelsema-heliumionmicroscopy-2014","role":"author","downloads":0},"bibtype":"article","biburl":null,"downloads":0,"keywords":[],"search_terms":["helium","ion","microscopy","hlawacek","veligura","van gastel","poelsema"],"title":"Helium ion microscopy","year":2014}