Structure of Deposition Chamber using Belt Source Evaporation Techniques in AMOLED Manufacturing. Hwang, C H
abstract   bibtex   
The organic deposition chamber has been developed using belt source evaporation techniques for the first time. The deposition chamber is consisted of the belt source, organic vapor source, and the mask alignment assembly. The rollers operate for the thin metal belt to continuously move with the automatic tension control. It has been proved for the belt source evaporation easy to operate and the alignment of the substrate/shadow mask becomes so simple to use in AMOLED manufacturing industry.
@article{hwang_structure_nodate,
	title = {Structure of {Deposition} {Chamber} using {Belt} {Source} {Evaporation} {Techniques} in {AMOLED} {Manufacturing}},
	abstract = {The organic deposition chamber has been developed using belt source evaporation techniques for the first time. The deposition chamber is consisted of the belt source, organic vapor source, and the mask alignment assembly. The rollers operate for the thin metal belt to continuously move with the automatic tension control. It has been proved for the belt source evaporation easy to operate and the alignment of the substrate/shadow mask becomes so simple to use in AMOLED manufacturing industry.},
	language = {en},
	author = {Hwang, C H},
	pages = {4}
}
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