@article{pop00159,
	author = {M MAZHAR ISLAMRAJA and MA CAPPELLI and JP McVittie and KC Saraswat},
	type = {Journal article},
	title = {A 3-dimensional model for low-pressure chemical-vapor-deposition step coverage in trenches and circular vias},
	journal = {Journal of applied physics},
	citation = {https://scholar.google.com/citations?view_op=view_citation\&hl=en\&user=UXFidGcAAAAJ\&cstart=200\&pagesize=100\&citation_for_view=UXFidGcAAAAJ:R22Rs3tN8aoC},
	year = {1991},
	volume = {70},
	number = {11},
	pages = {7137--7140},
	note = {2 cites: https://scholar.google.com/scholar?oi=bibs\&hl=en\&cites=9650374623353023094},
	note = {Query date: 2020-04-08 23:21:50},
}

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