@article{Jayaraman1995a,
   abstract = {The present work focuses on the synthesis of ultrathin palladium films (< 500 nm) grown on porous ceramic supports by the sputter deposition technique. The following two parameters were found most critical to the synthesis of the gas-tight metal-ceramic composite: substrate type (surface roughness) and the deposition temperature. Fairly gas-tight Pd films with good adhesion could be coated on sol-gel derived fine pore γ-alumina supports but not on coarse α-alumina supports. Poor adhesion between the coated film and the γ-alumina support was observed for films coated at room temperature, to a thickness of 300 nm or larger. Both coating temperature (80-600°C) and substrate type affect the grain size, nitrogen gas-tightness and the adhesion of the deposited metallic films. Characterization results show that 400°C is the optimum coating temperature. XRD and SEM data on these films show that the films are fairly crystalline, with a uniform and smooth surface morphology. © 1995.},
   author = {V. Jayaraman and Y. S. Lin and M. Pakala and R. Y. Lin},
   doi = {10.1016/0376-7388(94)00212-H},
   issn = {03767388},
   issue = {1},
   journal = {Journal of Membrane Science},
   keywords = {Composite membranes,Gas separations,Inorganic membranes,Membrane preparation and structure,Metal membranes},
   pages = {89-100},
   title = {Fabrication of ultrathin metallic membranes on ceramic supports by sputter deposition},
   volume = {99},
   year = {1995},
}

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