{"_id":"fzat5t7xYELLkHXvL","bibbaseid":"jayaraman-lin-pakala-lin-fabricationofultrathinmetallicmembranesonceramicsupportsbysputterdeposition-1995","author_short":["Jayaraman, V.","Lin, Y. S.","Pakala, M.","Lin, R. Y."],"bibdata":{"bibtype":"article","type":"article","abstract":"The present work focuses on the synthesis of ultrathin palladium films (< 500 nm) grown on porous ceramic supports by the sputter deposition technique. The following two parameters were found most critical to the synthesis of the gas-tight metal-ceramic composite: substrate type (surface roughness) and the deposition temperature. Fairly gas-tight Pd films with good adhesion could be coated on sol-gel derived fine pore γ-alumina supports but not on coarse α-alumina supports. Poor adhesion between the coated film and the γ-alumina support was observed for films coated at room temperature, to a thickness of 300 nm or larger. Both coating temperature (80-600°C) and substrate type affect the grain size, nitrogen gas-tightness and the adhesion of the deposited metallic films. Characterization results show that 400°C is the optimum coating temperature. XRD and SEM data on these films show that the films are fairly crystalline, with a uniform and smooth surface morphology. © 1995.","author":[{"firstnames":["V."],"propositions":[],"lastnames":["Jayaraman"],"suffixes":[]},{"firstnames":["Y.","S."],"propositions":[],"lastnames":["Lin"],"suffixes":[]},{"firstnames":["M."],"propositions":[],"lastnames":["Pakala"],"suffixes":[]},{"firstnames":["R.","Y."],"propositions":[],"lastnames":["Lin"],"suffixes":[]}],"doi":"10.1016/0376-7388(94)00212-H","issn":"03767388","issue":"1","journal":"Journal of Membrane Science","keywords":"Composite membranes,Gas separations,Inorganic membranes,Membrane preparation and structure,Metal membranes","pages":"89-100","title":"Fabrication of ultrathin metallic membranes on ceramic supports by sputter deposition","volume":"99","year":"1995","bibtex":"@article{Jayaraman1995a,\n abstract = {The present work focuses on the synthesis of ultrathin palladium films (< 500 nm) grown on porous ceramic supports by the sputter deposition technique. The following two parameters were found most critical to the synthesis of the gas-tight metal-ceramic composite: substrate type (surface roughness) and the deposition temperature. Fairly gas-tight Pd films with good adhesion could be coated on sol-gel derived fine pore γ-alumina supports but not on coarse α-alumina supports. Poor adhesion between the coated film and the γ-alumina support was observed for films coated at room temperature, to a thickness of 300 nm or larger. Both coating temperature (80-600°C) and substrate type affect the grain size, nitrogen gas-tightness and the adhesion of the deposited metallic films. Characterization results show that 400°C is the optimum coating temperature. XRD and SEM data on these films show that the films are fairly crystalline, with a uniform and smooth surface morphology. © 1995.},\n author = {V. Jayaraman and Y. S. Lin and M. Pakala and R. Y. Lin},\n doi = {10.1016/0376-7388(94)00212-H},\n issn = {03767388},\n issue = {1},\n journal = {Journal of Membrane Science},\n keywords = {Composite membranes,Gas separations,Inorganic membranes,Membrane preparation and structure,Metal membranes},\n pages = {89-100},\n title = {Fabrication of ultrathin metallic membranes on ceramic supports by sputter deposition},\n volume = {99},\n year = {1995},\n}\n","author_short":["Jayaraman, V.","Lin, Y. S.","Pakala, M.","Lin, R. Y."],"key":"Jayaraman1995a","id":"Jayaraman1995a","bibbaseid":"jayaraman-lin-pakala-lin-fabricationofultrathinmetallicmembranesonceramicsupportsbysputterdeposition-1995","role":"author","urls":{},"keyword":["Composite membranes","Gas separations","Inorganic membranes","Membrane preparation and structure","Metal membranes"],"metadata":{"authorlinks":{}}},"bibtype":"article","biburl":"https://bibbase.org/network/files/QJd5jTh3GMYoFC2sK","dataSources":["afFrdSdmsNikJWZNM","4xtXLpDtLSJKq7xty","DP64ZrtM83gwGq5AX","wCoBgCttwnttTBsce"],"keywords":["composite membranes","gas separations","inorganic membranes","membrane preparation and structure","metal membranes"],"search_terms":["fabrication","ultrathin","metallic","membranes","ceramic","supports","sputter","deposition","jayaraman","lin","pakala","lin"],"title":"Fabrication of ultrathin metallic membranes on ceramic supports by sputter deposition","year":1995}