Piezoelectric transducers using micromachined bulk piezo substrates. Jiang, X., Snook, K., Hackenberger, W., Cheng, A., & Xu, J. In 2008 IEEE Sensors, pages 573–576, Lecce, Italy, October, 2008. IEEE. ![Piezoelectric transducers using micromachined bulk piezo substrates [link]](https://bibbase.org/img/filetypes/link.svg "link")
Paper doi abstract bibtex Micromachining of bulk piezoelectric substrates for fabrication of high frequency, broadband piezoelectric composite transducers is reported in this paper. A deep reactive ion etching process was developed for bulk PMN-PT single crystal etching with an aspect ratio of \textgreater 8. A piezoelectric composite with a resonance of 75 MHz was fabricated and the electromechanical coupling coefficient was measured to be 0.67. A 75 MHz piezoelectric composite transducer was prototyped and pulse echo experiments showed that the transducer bandwidth is about 80 - 90% and the sensitivity was significantly improved (\textgreater 10 dB gain) relative to a commercial 75 MHz transducer. The developed HF piezoelectric composite transducers hold promise for medical ultrasound imaging, ultrasound NDE, and other novel sensors for biological, medical and industrial process monitoring.
@inproceedings{jiang_piezoelectric_2008,
address = {Lecce, Italy},
title = {Piezoelectric transducers using micromachined bulk piezo substrates},
isbn = {978-1-4244-2580-8},
url = {http://ieeexplore.ieee.org/document/4716504/},
doi = {10.1109/ICSENS.2008.4716504},
abstract = {Micromachining of bulk piezoelectric substrates for fabrication of high frequency, broadband piezoelectric composite transducers is reported in this paper. A deep reactive ion etching process was developed for bulk PMN-PT single crystal etching with an aspect ratio of {\textgreater} 8. A piezoelectric composite with a resonance of 75 MHz was fabricated and the electromechanical coupling coefficient was measured to be 0.67. A 75 MHz piezoelectric composite transducer was prototyped and pulse echo experiments showed that the transducer bandwidth is about 80 - 90\% and the sensitivity was significantly improved ({\textgreater} 10 dB gain) relative to a commercial 75 MHz transducer. The developed HF piezoelectric composite transducers hold promise for medical ultrasound imaging, ultrasound NDE, and other novel sensors for biological, medical and industrial process monitoring.},
language = {en},
urldate = {2021-01-03},
booktitle = {2008 {IEEE} {Sensors}},
publisher = {IEEE},
author = {Jiang, Xiaoning and Snook, K.A. and Hackenberger, W.S. and Cheng, A. and Xu, J.},
month = oct,
year = {2008},
keywords = {🚩},
pages = {573--576},
}
Downloads: 0
{"_id":"cLxpLE9cTA8m54PFi","bibbaseid":"jiang-snook-hackenberger-cheng-xu-piezoelectrictransducersusingmicromachinedbulkpiezosubstrates-2008","author_short":["Jiang, X.","Snook, K.","Hackenberger, W.","Cheng, A.","Xu, J."],"bibdata":{"bibtype":"inproceedings","type":"inproceedings","address":"Lecce, Italy","title":"Piezoelectric transducers using micromachined bulk piezo substrates","isbn":"978-1-4244-2580-8","url":"http://ieeexplore.ieee.org/document/4716504/","doi":"10.1109/ICSENS.2008.4716504","abstract":"Micromachining of bulk piezoelectric substrates for fabrication of high frequency, broadband piezoelectric composite transducers is reported in this paper. A deep reactive ion etching process was developed for bulk PMN-PT single crystal etching with an aspect ratio of \\textgreater 8. A piezoelectric composite with a resonance of 75 MHz was fabricated and the electromechanical coupling coefficient was measured to be 0.67. A 75 MHz piezoelectric composite transducer was prototyped and pulse echo experiments showed that the transducer bandwidth is about 80 - 90% and the sensitivity was significantly improved (\\textgreater 10 dB gain) relative to a commercial 75 MHz transducer. The developed HF piezoelectric composite transducers hold promise for medical ultrasound imaging, ultrasound NDE, and other novel sensors for biological, medical and industrial process monitoring.","language":"en","urldate":"2021-01-03","booktitle":"2008 IEEE Sensors","publisher":"IEEE","author":[{"propositions":[],"lastnames":["Jiang"],"firstnames":["Xiaoning"],"suffixes":[]},{"propositions":[],"lastnames":["Snook"],"firstnames":["K.A."],"suffixes":[]},{"propositions":[],"lastnames":["Hackenberger"],"firstnames":["W.S."],"suffixes":[]},{"propositions":[],"lastnames":["Cheng"],"firstnames":["A."],"suffixes":[]},{"propositions":[],"lastnames":["Xu"],"firstnames":["J."],"suffixes":[]}],"month":"October","year":"2008","keywords":"🚩","pages":"573–576","bibtex":"@inproceedings{jiang_piezoelectric_2008,\n\taddress = {Lecce, Italy},\n\ttitle = {Piezoelectric transducers using micromachined bulk piezo substrates},\n\tisbn = {978-1-4244-2580-8},\n\turl = {http://ieeexplore.ieee.org/document/4716504/},\n\tdoi = {10.1109/ICSENS.2008.4716504},\n\tabstract = {Micromachining of bulk piezoelectric substrates for fabrication of high frequency, broadband piezoelectric composite transducers is reported in this paper. A deep reactive ion etching process was developed for bulk PMN-PT single crystal etching with an aspect ratio of {\\textgreater} 8. A piezoelectric composite with a resonance of 75 MHz was fabricated and the electromechanical coupling coefficient was measured to be 0.67. A 75 MHz piezoelectric composite transducer was prototyped and pulse echo experiments showed that the transducer bandwidth is about 80 - 90\\% and the sensitivity was significantly improved ({\\textgreater} 10 dB gain) relative to a commercial 75 MHz transducer. The developed HF piezoelectric composite transducers hold promise for medical ultrasound imaging, ultrasound NDE, and other novel sensors for biological, medical and industrial process monitoring.},\n\tlanguage = {en},\n\turldate = {2021-01-03},\n\tbooktitle = {2008 {IEEE} {Sensors}},\n\tpublisher = {IEEE},\n\tauthor = {Jiang, Xiaoning and Snook, K.A. and Hackenberger, W.S. and Cheng, A. and Xu, J.},\n\tmonth = oct,\n\tyear = {2008},\n\tkeywords = {🚩},\n\tpages = {573--576},\n}\n\n","author_short":["Jiang, X.","Snook, K.","Hackenberger, W.","Cheng, A.","Xu, J."],"key":"jiang_piezoelectric_2008","id":"jiang_piezoelectric_2008","bibbaseid":"jiang-snook-hackenberger-cheng-xu-piezoelectrictransducersusingmicromachinedbulkpiezosubstrates-2008","role":"author","urls":{"Paper":"http://ieeexplore.ieee.org/document/4716504/"},"keyword":["🚩"],"metadata":{"authorlinks":{}}},"bibtype":"inproceedings","biburl":"https://bibbase.org/zotero/kongzh95","dataSources":["tAdPv9cJdcbuFicdv"],"keywords":["🚩"],"search_terms":["piezoelectric","transducers","using","micromachined","bulk","piezo","substrates","jiang","snook","hackenberger","cheng","xu"],"title":"Piezoelectric transducers using micromachined bulk piezo substrates","year":2008}