Piezoelectric transducers using micromachined bulk piezo substrates. Jiang, X., Snook, K., Hackenberger, W., Cheng, A., & Xu, J. In 2008 IEEE Sensors, pages 573–576, Lecce, Italy, October, 2008. IEEE.
Piezoelectric transducers using micromachined bulk piezo substrates [link]Paper  doi  abstract   bibtex   
Micromachining of bulk piezoelectric substrates for fabrication of high frequency, broadband piezoelectric composite transducers is reported in this paper. A deep reactive ion etching process was developed for bulk PMN-PT single crystal etching with an aspect ratio of \textgreater 8. A piezoelectric composite with a resonance of 75 MHz was fabricated and the electromechanical coupling coefficient was measured to be 0.67. A 75 MHz piezoelectric composite transducer was prototyped and pulse echo experiments showed that the transducer bandwidth is about 80 - 90% and the sensitivity was significantly improved (\textgreater 10 dB gain) relative to a commercial 75 MHz transducer. The developed HF piezoelectric composite transducers hold promise for medical ultrasound imaging, ultrasound NDE, and other novel sensors for biological, medical and industrial process monitoring.
@inproceedings{jiang_piezoelectric_2008,
	address = {Lecce, Italy},
	title = {Piezoelectric transducers using micromachined bulk piezo substrates},
	isbn = {978-1-4244-2580-8},
	url = {http://ieeexplore.ieee.org/document/4716504/},
	doi = {10.1109/ICSENS.2008.4716504},
	abstract = {Micromachining of bulk piezoelectric substrates for fabrication of high frequency, broadband piezoelectric composite transducers is reported in this paper. A deep reactive ion etching process was developed for bulk PMN-PT single crystal etching with an aspect ratio of {\textgreater} 8. A piezoelectric composite with a resonance of 75 MHz was fabricated and the electromechanical coupling coefficient was measured to be 0.67. A 75 MHz piezoelectric composite transducer was prototyped and pulse echo experiments showed that the transducer bandwidth is about 80 - 90\% and the sensitivity was significantly improved ({\textgreater} 10 dB gain) relative to a commercial 75 MHz transducer. The developed HF piezoelectric composite transducers hold promise for medical ultrasound imaging, ultrasound NDE, and other novel sensors for biological, medical and industrial process monitoring.},
	language = {en},
	urldate = {2021-01-03},
	booktitle = {2008 {IEEE} {Sensors}},
	publisher = {IEEE},
	author = {Jiang, Xiaoning and Snook, K.A. and Hackenberger, W.S. and Cheng, A. and Xu, J.},
	month = oct,
	year = {2008},
	keywords = {🚩},
	pages = {573--576},
}

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