Piezoelectric transducers using micromachined bulk piezo substrates. Jiang, X., Snook, K., Hackenberger, W., Cheng, A., & Xu, J. In 2008 IEEE Sensors, pages 573–576, Lecce, Italy, October, 2008. IEEE.
Paper doi abstract bibtex Micromachining of bulk piezoelectric substrates for fabrication of high frequency, broadband piezoelectric composite transducers is reported in this paper. A deep reactive ion etching process was developed for bulk PMN-PT single crystal etching with an aspect ratio of \textgreater 8. A piezoelectric composite with a resonance of 75 MHz was fabricated and the electromechanical coupling coefficient was measured to be 0.67. A 75 MHz piezoelectric composite transducer was prototyped and pulse echo experiments showed that the transducer bandwidth is about 80 - 90% and the sensitivity was significantly improved (\textgreater 10 dB gain) relative to a commercial 75 MHz transducer. The developed HF piezoelectric composite transducers hold promise for medical ultrasound imaging, ultrasound NDE, and other novel sensors for biological, medical and industrial process monitoring.
@inproceedings{jiang_piezoelectric_2008,
address = {Lecce, Italy},
title = {Piezoelectric transducers using micromachined bulk piezo substrates},
isbn = {978-1-4244-2580-8},
url = {http://ieeexplore.ieee.org/document/4716504/},
doi = {10.1109/ICSENS.2008.4716504},
abstract = {Micromachining of bulk piezoelectric substrates for fabrication of high frequency, broadband piezoelectric composite transducers is reported in this paper. A deep reactive ion etching process was developed for bulk PMN-PT single crystal etching with an aspect ratio of {\textgreater} 8. A piezoelectric composite with a resonance of 75 MHz was fabricated and the electromechanical coupling coefficient was measured to be 0.67. A 75 MHz piezoelectric composite transducer was prototyped and pulse echo experiments showed that the transducer bandwidth is about 80 - 90\% and the sensitivity was significantly improved ({\textgreater} 10 dB gain) relative to a commercial 75 MHz transducer. The developed HF piezoelectric composite transducers hold promise for medical ultrasound imaging, ultrasound NDE, and other novel sensors for biological, medical and industrial process monitoring.},
language = {en},
urldate = {2021-01-03},
booktitle = {2008 {IEEE} {Sensors}},
publisher = {IEEE},
author = {Jiang, Xiaoning and Snook, K.A. and Hackenberger, W.S. and Cheng, A. and Xu, J.},
month = oct,
year = {2008},
keywords = {🚩},
pages = {573--576},
}
Downloads: 0
{"_id":"cLxpLE9cTA8m54PFi","bibbaseid":"jiang-snook-hackenberger-cheng-xu-piezoelectrictransducersusingmicromachinedbulkpiezosubstrates-2008","author_short":["Jiang, X.","Snook, K.","Hackenberger, W.","Cheng, A.","Xu, J."],"bibdata":{"bibtype":"inproceedings","type":"inproceedings","address":"Lecce, Italy","title":"Piezoelectric transducers using micromachined bulk piezo substrates","isbn":"978-1-4244-2580-8","url":"http://ieeexplore.ieee.org/document/4716504/","doi":"10.1109/ICSENS.2008.4716504","abstract":"Micromachining of bulk piezoelectric substrates for fabrication of high frequency, broadband piezoelectric composite transducers is reported in this paper. A deep reactive ion etching process was developed for bulk PMN-PT single crystal etching with an aspect ratio of \\textgreater 8. A piezoelectric composite with a resonance of 75 MHz was fabricated and the electromechanical coupling coefficient was measured to be 0.67. A 75 MHz piezoelectric composite transducer was prototyped and pulse echo experiments showed that the transducer bandwidth is about 80 - 90% and the sensitivity was significantly improved (\\textgreater 10 dB gain) relative to a commercial 75 MHz transducer. The developed HF piezoelectric composite transducers hold promise for medical ultrasound imaging, ultrasound NDE, and other novel sensors for biological, medical and industrial process monitoring.","language":"en","urldate":"2021-01-03","booktitle":"2008 IEEE Sensors","publisher":"IEEE","author":[{"propositions":[],"lastnames":["Jiang"],"firstnames":["Xiaoning"],"suffixes":[]},{"propositions":[],"lastnames":["Snook"],"firstnames":["K.A."],"suffixes":[]},{"propositions":[],"lastnames":["Hackenberger"],"firstnames":["W.S."],"suffixes":[]},{"propositions":[],"lastnames":["Cheng"],"firstnames":["A."],"suffixes":[]},{"propositions":[],"lastnames":["Xu"],"firstnames":["J."],"suffixes":[]}],"month":"October","year":"2008","keywords":"🚩","pages":"573–576","bibtex":"@inproceedings{jiang_piezoelectric_2008,\n\taddress = {Lecce, Italy},\n\ttitle = {Piezoelectric transducers using micromachined bulk piezo substrates},\n\tisbn = {978-1-4244-2580-8},\n\turl = {http://ieeexplore.ieee.org/document/4716504/},\n\tdoi = {10.1109/ICSENS.2008.4716504},\n\tabstract = {Micromachining of bulk piezoelectric substrates for fabrication of high frequency, broadband piezoelectric composite transducers is reported in this paper. A deep reactive ion etching process was developed for bulk PMN-PT single crystal etching with an aspect ratio of {\\textgreater} 8. A piezoelectric composite with a resonance of 75 MHz was fabricated and the electromechanical coupling coefficient was measured to be 0.67. A 75 MHz piezoelectric composite transducer was prototyped and pulse echo experiments showed that the transducer bandwidth is about 80 - 90\\% and the sensitivity was significantly improved ({\\textgreater} 10 dB gain) relative to a commercial 75 MHz transducer. The developed HF piezoelectric composite transducers hold promise for medical ultrasound imaging, ultrasound NDE, and other novel sensors for biological, medical and industrial process monitoring.},\n\tlanguage = {en},\n\turldate = {2021-01-03},\n\tbooktitle = {2008 {IEEE} {Sensors}},\n\tpublisher = {IEEE},\n\tauthor = {Jiang, Xiaoning and Snook, K.A. and Hackenberger, W.S. and Cheng, A. and Xu, J.},\n\tmonth = oct,\n\tyear = {2008},\n\tkeywords = {🚩},\n\tpages = {573--576},\n}\n\n","author_short":["Jiang, X.","Snook, K.","Hackenberger, W.","Cheng, A.","Xu, J."],"key":"jiang_piezoelectric_2008","id":"jiang_piezoelectric_2008","bibbaseid":"jiang-snook-hackenberger-cheng-xu-piezoelectrictransducersusingmicromachinedbulkpiezosubstrates-2008","role":"author","urls":{"Paper":"http://ieeexplore.ieee.org/document/4716504/"},"keyword":["🚩"],"metadata":{"authorlinks":{}}},"bibtype":"inproceedings","biburl":"https://bibbase.org/zotero/kongzh95","dataSources":["tAdPv9cJdcbuFicdv"],"keywords":["🚩"],"search_terms":["piezoelectric","transducers","using","micromachined","bulk","piezo","substrates","jiang","snook","hackenberger","cheng","xu"],"title":"Piezoelectric transducers using micromachined bulk piezo substrates","year":2008}