A data mining approach to automate fault detection model development in the semiconductor manufacturing process. Kerdprasop, K. & Kerdprasop, N. Int. J. Mech, 5(4):336–344, 2011.
bibtex   
@article{kerdprasop2011data,
  title={A data mining approach to automate fault detection model development in the semiconductor manufacturing process},
  author={Kerdprasop, Kittisak and Kerdprasop, Nittaya},
  journal={Int. J. Mech},
  volume={5},
  number={4},
  pages={336--344},
  year={2011}
}

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