Computational intelligence techniques to fault detection in the semiconductor manufacturing process. Kerdprasop, K. & Kerdprasop, N. Applied Mechanics and Materials, 52:1171–1176, Trans Tech Publications Ltd, 2011. bibtex @article{kerdprasop2011computational,
title={Computational intelligence techniques to fault detection in the semiconductor manufacturing process},
author={Kerdprasop, Kittisak and Kerdprasop, Nittaya},
journal={Applied Mechanics and Materials},
volume={52},
pages={1171--1176},
year={2011},
publisher={Trans Tech Publications Ltd}
}
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{"_id":"Hikqd5uanu9FhAEHi","bibbaseid":"kerdprasop-kerdprasop-computationalintelligencetechniquestofaultdetectioninthesemiconductormanufacturingprocess-2011","author_short":["Kerdprasop, K.","Kerdprasop, N."],"bibdata":{"bibtype":"article","type":"article","title":"Computational intelligence techniques to fault detection in the semiconductor manufacturing process","author":[{"propositions":[],"lastnames":["Kerdprasop"],"firstnames":["Kittisak"],"suffixes":[]},{"propositions":[],"lastnames":["Kerdprasop"],"firstnames":["Nittaya"],"suffixes":[]}],"journal":"Applied Mechanics and Materials","volume":"52","pages":"1171–1176","year":"2011","publisher":"Trans Tech Publications Ltd","bibtex":"@article{kerdprasop2011computational,\n title={Computational intelligence techniques to fault detection in the semiconductor manufacturing process},\n author={Kerdprasop, Kittisak and Kerdprasop, Nittaya},\n journal={Applied Mechanics and Materials},\n volume={52},\n pages={1171--1176},\n year={2011},\n publisher={Trans Tech Publications Ltd}\n}\n\n","author_short":["Kerdprasop, K.","Kerdprasop, N."],"key":"kerdprasop2011computational","id":"kerdprasop2011computational","bibbaseid":"kerdprasop-kerdprasop-computationalintelligencetechniquestofaultdetectioninthesemiconductormanufacturingprocess-2011","role":"author","urls":{},"metadata":{"authorlinks":{}}},"bibtype":"article","biburl":"https://bibbase.org/f/HnQC7A6C8WxhqExKR/CPE_Nittaya_Kerdprasop.bib","dataSources":["i2p6t5GidYbtznHvX","ZMigHSvPR5DDSsqAW","p7TcfQRkYAco4B7Nv","yG3Dz9pr4Ys2nNyak"],"keywords":[],"search_terms":["computational","intelligence","techniques","fault","detection","semiconductor","manufacturing","process","kerdprasop","kerdprasop"],"title":"Computational intelligence techniques to fault detection in the semiconductor manufacturing process","year":2011}