@article{kerdprasop2011computational,
  title={Computational intelligence techniques to fault detection in the semiconductor manufacturing process},
  author={Kerdprasop, Kittisak and Kerdprasop, Nittaya},
  journal={Applied Mechanics and Materials},
  volume={52},
  pages={1171--1176},
  year={2011},
  publisher={Trans Tech Publications Ltd}
}

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