@article{kerdprasop2014tool,
  title={Tool sequence analysis and performance prediction in the wafer fabrication process},
  author={Kerdprasop, Kittisak and Kerdprasop, Nittaya},
  journal={International Journal of Systems Applications, Engineering \& Development},
  volume={8},
  pages={268--276},
  year={2014}
}

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