Development of a Micromanipulation System with Force Sensing. Khan, S., Nergis, A. O., Patoglu, V., & Sabanovic, A. In IEEE/RSJ International Conference on Intelligent Robots and Systems, 2007. abstract bibtex This article provides in-depth knowledge about our undergoing effort to develop an open architecture micromanipulation system with force sensing capabilities. The major requirement to perform any micromanipulation task effectively is to ensure the controlled motion of actuators within nanometer accuracy with low overshoot even under the influence of disturbances. Moreover, to achieve high dexterity in manipulation, control of the interaction forces is required. In micromanipulation, control of interaction forces necessitates force sensing in milli-Newton range with nano-Newton resolution. In this paper, we present a position controller based on a discrete time sliding mode control architecture along with a disturbance observer. Experimental verifications for this controller are demonstrated for 100, 50 and 10 nanometer step inputs applied to PZT stages. Our results indicate that position tracking accuracies up to 10 nanometers, without any overshoot and low steady state error are achievable. Furthermore, the paper includes experimental verification of force sensing within nano-Newton resolution using a piezoresistive cantilever endeffector. Experimental results are compared to the theoretical estimates of the change in attractive forces as a function of decreasing distance and of the pull off force between a silicon tip and a glass surface, respectively. Good agreement among the experimental data and the theoretical estimates has been demonstrated.
@InProceedings{Khan2007b,
booktitle = {IEEE/RSJ International Conference on Intelligent Robots and Systems},
author = {Shahzad Khan and Ahmet Ozcan Nergis and Volkan Patoglu and Asif Sabanovic},
title = {{Development of a Micromanipulation System with Force Sensing}},
year = {2007},
abstract ={This article provides in-depth knowledge about our undergoing effort to develop an open architecture micromanipulation system with force sensing capabilities. The major requirement to perform any micromanipulation
task effectively is to ensure the controlled motion of actuators within nanometer accuracy with low overshoot even under the influence of disturbances. Moreover, to achieve high dexterity in manipulation, control of the interaction
forces is required. In micromanipulation, control of interaction forces necessitates force sensing in milli-Newton range with nano-Newton resolution. In this paper, we present a position controller based on a discrete time sliding
mode control architecture along with a disturbance observer. Experimental verifications for this controller are demonstrated for 100, 50 and 10 nanometer step inputs applied to PZT stages. Our results indicate that position
tracking accuracies up to 10 nanometers, without any overshoot and low steady state error are achievable. Furthermore, the paper includes experimental verification of force sensing within nano-Newton resolution using a
piezoresistive cantilever endeffector. Experimental results are compared to the theoretical estimates of the change in attractive forces as a function of decreasing distance and of the pull off force between a silicon tip and a
glass surface, respectively. Good agreement among the experimental data and the theoretical estimates has been demonstrated.}
}
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{"_id":{"_str":"534213c8ecd21cdc07000064"},"__v":11,"authorIDs":["5456f7f58b01c819300000d0","54572f622abc8e9f3700015e"],"author_short":["Khan, S.","Nergis, A. O.","Patoglu, V.","Sabanovic, A."],"bibbaseid":"khan-nergis-patoglu-sabanovic-developmentofamicromanipulationsystemwithforcesensing-2007","bibdata":{"bibtype":"inproceedings","type":"inproceedings","booktitle":"IEEE/RSJ International Conference on Intelligent Robots and Systems","author":[{"firstnames":["Shahzad"],"propositions":[],"lastnames":["Khan"],"suffixes":[]},{"firstnames":["Ahmet","Ozcan"],"propositions":[],"lastnames":["Nergis"],"suffixes":[]},{"firstnames":["Volkan"],"propositions":[],"lastnames":["Patoglu"],"suffixes":[]},{"firstnames":["Asif"],"propositions":[],"lastnames":["Sabanovic"],"suffixes":[]}],"title":"Development of a Micromanipulation System with Force Sensing","year":"2007","abstract":"This article provides in-depth knowledge about our undergoing effort to develop an open architecture micromanipulation system with force sensing capabilities. The major requirement to perform any micromanipulation task effectively is to ensure the controlled motion of actuators within nanometer accuracy with low overshoot even under the influence of disturbances. Moreover, to achieve high dexterity in manipulation, control of the interaction forces is required. In micromanipulation, control of interaction forces necessitates force sensing in milli-Newton range with nano-Newton resolution. In this paper, we present a position controller based on a discrete time sliding mode control architecture along with a disturbance observer. Experimental verifications for this controller are demonstrated for 100, 50 and 10 nanometer step inputs applied to PZT stages. Our results indicate that position tracking accuracies up to 10 nanometers, without any overshoot and low steady state error are achievable. Furthermore, the paper includes experimental verification of force sensing within nano-Newton resolution using a piezoresistive cantilever endeffector. Experimental results are compared to the theoretical estimates of the change in attractive forces as a function of decreasing distance and of the pull off force between a silicon tip and a glass surface, respectively. Good agreement among the experimental data and the theoretical estimates has been demonstrated.","bibtex":"@InProceedings{Khan2007b,\n\tbooktitle = {IEEE/RSJ International Conference on Intelligent Robots and Systems},\n\tauthor = {Shahzad Khan and Ahmet Ozcan Nergis and Volkan Patoglu and Asif Sabanovic},\n\ttitle = {{Development of a Micromanipulation System with Force Sensing}},\n\tyear = {2007},\n\tabstract ={This article provides in-depth knowledge about our undergoing effort to develop an open architecture micromanipulation system with force sensing capabilities. The major requirement to perform any micromanipulation\ntask effectively is to ensure the controlled motion of actuators within nanometer accuracy with low overshoot even under the influence of disturbances. Moreover, to achieve high dexterity in manipulation, control of the interaction\nforces is required. In micromanipulation, control of interaction forces necessitates force sensing in milli-Newton range with nano-Newton resolution. In this paper, we present a position controller based on a discrete time sliding\nmode control architecture along with a disturbance observer. Experimental verifications for this controller are demonstrated for 100, 50 and 10 nanometer step inputs applied to PZT stages. Our results indicate that position\ntracking accuracies up to 10 nanometers, without any overshoot and low steady state error are achievable. Furthermore, the paper includes experimental verification of force sensing within nano-Newton resolution using a\npiezoresistive cantilever endeffector. Experimental results are compared to the theoretical estimates of the change in attractive forces as a function of decreasing distance and of the pull off force between a silicon tip and a\nglass surface, respectively. Good agreement among the experimental data and the theoretical estimates has been demonstrated.}\n}\n\n","author_short":["Khan, S.","Nergis, A. O.","Patoglu, V.","Sabanovic, A."],"key":"Khan2007b","id":"Khan2007b","bibbaseid":"khan-nergis-patoglu-sabanovic-developmentofamicromanipulationsystemwithforcesensing-2007","role":"author","urls":{},"downloads":0,"html":"","metadata":{"authorlinks":{}}},"bibtype":"inproceedings","biburl":"hmi.sabanciuniv.edu/patoglu_bib.bib","downloads":0,"keywords":[],"search_terms":["development","micromanipulation","system","force","sensing","khan","nergis","patoglu","sabanovic"],"title":"Development of a Micromanipulation System with Force Sensing","year":2007,"dataSources":["g2mDMKihSyQjpNZsS","iJc3qKk8FyPTPcHad"]}