@article{Kim2014,
   author = {Kyoung-tae Kim and Cheolbok Kim and David E Senior and Dongsu Kim and Yong-kyu Yoon},
   doi = {10.1016/j.tsf.2014.06.047},
   issn = {0040-6090},
   journal = {Thin Solid Films},
   keywords = {Barium Strontium Titanate,Dielectric Properties,Microwave,Silver Doping,Sol-Gel Deposition,Tunability,barium strontium titanate},
   pages = {172-178},
   title = {Plasma enhanced atomic layer deposition of Fe2O3 thin films},
   volume = {565},
   url = {http://dx.doi.org/10.1016/j.tsf.2014.06.047},
   year = {2014},
}

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