@article{kitagawa_surface_2014,
	title = {Surface and thickness profile measurement of a transparent film by three-wavelength vertical scanning interferometry},
	volume = {39},
	copyright = {© 2014 Optical Society of America},
	issn = {1539-4794},
	url = {https://opg.optica.org/ol/abstract.cfm?uri=ol-39-14-4172},
	doi = {10.1364/OL.39.004172},
	abstract = {We have developed a novel areal film thickness and topography measurement method using three-wavelength interferometry. The method simultaneously estimates the profiles of the front and back surfaces and the thickness distribution of a transparent film by model-based separation of two overlapped signals in an interferogram. The validity of the proposed method is demonstrated using computer simulations and actual experiments.},
	language = {EN},
	number = {14},
	urldate = {2022-10-14},
	journal = {Optics Letters},
	author = {Kitagawa, Katsuichi},
	month = jul,
	year = {2014},
	note = {Publisher: Optica Publishing Group},
	keywords = {Computer simulation, Extinction coefficients, Fourier transforms, Interferometric imaging, Spectral discrimination, White light interferometry},
	pages = {4172--4175},
}

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