Comparison of the 3 omega method and time-domain thermoreflectance for measurements of the cross-plane thermal conductivity of epitaxial semiconductors

Comparison of the 3 omega method and time-domain thermoreflectance for measurements of the cross-plane thermal conductivity of epitaxial semiconductors. Koh, Y. K., Singer, S. L., Kim, W., Zide, J. M. O., Lu, H., Cahill, D. G., Majumdar, A., & Gossard, A. C. Journal of Applied PhysicsJournal of Applied Physics, 105:054303, 2009/03/01, 2009.

Paper abstract bibtex

The 3 ? technique and time-domain thermoreflectance(TDTR) are two experimental methods capable of measuring the cross-plane thermal conductivity of thin films. We compare the cross-plane thermal conductivity measured by the 3 ? method and TDTR on epitaxial ( In 0.52 Al 0.48 ) x ( In 0.53 Ga 0.47 ) 1 ? x As alloy layers with embedded ErAs nanoparticles.Thermal conductivities measured by TDTR at low modulation frequencies ( ? 1 MHz ) are typically in good agreement with thermal conductivities measured by the 3 ? method. We discuss the accuracy and limitations of both methods and provide guidelines for estimating uncertainties for each approach.

@article {497,
	title = {Comparison of the 3 omega method and time-domain thermoreflectance for measurements of the cross-plane thermal conductivity of epitaxial semiconductors},
	journal = {Journal of Applied PhysicsJournal of Applied Physics},
	volume = {105},
	year = {2009},
	month = {2009/03/01},
	pages = {054303},
	abstract = {<p>The 3 ? technique and time-domain thermoreflectance(TDTR) are two experimental methods capable of measuring the cross-plane thermal conductivity of thin films. We compare the cross-plane thermal conductivity measured by the 3 ? method and TDTR on epitaxial ( In 0.52 Al 0.48 ) x ( In 0.53 Ga 0.47 ) 1 ? x As alloy layers with embedded ErAs nanoparticles.Thermal conductivities measured by TDTR at low modulation frequencies ( ? 1 MHz ) are typically in good agreement with thermal conductivities measured by the 3 ? method. We discuss the accuracy and limitations of both methods and provide guidelines for estimating uncertainties for each approach.</p>
},
	keywords = {Aluminium, Metallic thin films, Phonons, Thermal conductivity, Thin film thickness},
	isbn = {0021-8979, 1089-7550},
	url = {http://scitation.aip.org/content/aip/journal/jap/105/5/10.1063/1.3078808},
	author = {Koh, Yee Kan and Singer, Suzanne L. and Kim, Woochul and Zide, Joshua M. O. and Lu, Hong and Cahill, David G. and Majumdar, Arun and Gossard, Arthur C.}
}

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