@INPROCEEDINGS{2000SPIE.4178..325K,
       author = {{Kuhn}, Jonathan L. and {Barclay}, Richard B. and {Greenhouse}, Matthew A. and {Mott}, David B. and {Satyapal}, Shobita},
        title = "{Electromechanical simulation of a large-aperture MOEMS Fabry-Perot tunable filter}",
    booktitle = {MOEMS and Miniaturized Systems},
         year = 2000,
       editor = {{Motamedi}, M. Edward and {Goering}, Rolf},
       series = {Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series},
       volume = {4178},
        month = aug,
        pages = {325-335},
          doi = {10.1117/12.396504},
       adsurl = {https://ui.adsabs.harvard.edu/abs/2000SPIE.4178..325K},
      adsnote = {Provided by the SAO/NASA Astrophysics Data System}
}

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