A sampling decision system for semiconductor manufacturing: relying on virtual metrology and actual measurements. Kurz, D., Pilz, J., Schirru, A., Pampuri, S., & Luca, C. D. In Buckley, S. J. & Miller, J. A., editors, WSC, pages 2649-2660, 2014. IEEE/ACM.
A sampling decision system for semiconductor manufacturing: relying on virtual metrology and actual measurements. [link]Link  A sampling decision system for semiconductor manufacturing: relying on virtual metrology and actual measurements. [link]Paper  bibtex   
@inproceedings{conf/wsc/KurzPSPL14,
  added-at = {2021-10-14T00:00:00.000+0200},
  author = {Kurz, Daniel and Pilz, Jürgen and Schirru, Andrea and Pampuri, Simone and Luca, Cristina De},
  biburl = {https://www.bibsonomy.org/bibtex/2262fe9d40e18bd0766f10055ce459090/dblp},
  booktitle = {WSC},
  crossref = {conf/wsc/2014},
  editor = {Buckley, Stephen J. and Miller, John A.},
  ee = {http://dl.acm.org/citation.cfm?id=2694186},
  interhash = {fee0605c33da651793e59550cbc47aa4},
  intrahash = {262fe9d40e18bd0766f10055ce459090},
  keywords = {dblp},
  pages = {2649-2660},
  publisher = {IEEE/ACM},
  timestamp = {2024-04-09T16:45:23.000+0200},
  title = {A sampling decision system for semiconductor manufacturing: relying on virtual metrology and actual measurements.},
  url = {http://dblp.uni-trier.de/db/conf/wsc/wsc2014.html#KurzPSPL14},
  year = 2014
}

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