A sampling decision system for semiconductor manufacturing: relying on virtual metrology and actual measurements. Kurz, D., Pilz, J., Schirru, A., Pampuri, S., & Luca, C. D. In Buckley, S. J. & Miller, J. A., editors, WSC, pages 2649-2660, 2014. IEEE/ACM.
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Paper bibtex @inproceedings{conf/wsc/KurzPSPL14,
added-at = {2021-10-14T00:00:00.000+0200},
author = {Kurz, Daniel and Pilz, Jürgen and Schirru, Andrea and Pampuri, Simone and Luca, Cristina De},
biburl = {https://www.bibsonomy.org/bibtex/2262fe9d40e18bd0766f10055ce459090/dblp},
booktitle = {WSC},
crossref = {conf/wsc/2014},
editor = {Buckley, Stephen J. and Miller, John A.},
ee = {http://dl.acm.org/citation.cfm?id=2694186},
interhash = {fee0605c33da651793e59550cbc47aa4},
intrahash = {262fe9d40e18bd0766f10055ce459090},
keywords = {dblp},
pages = {2649-2660},
publisher = {IEEE/ACM},
timestamp = {2024-04-09T16:45:23.000+0200},
title = {A sampling decision system for semiconductor manufacturing: relying on virtual metrology and actual measurements.},
url = {http://dblp.uni-trier.de/db/conf/wsc/wsc2014.html#KurzPSPL14},
year = 2014
}
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