@article{DBLP:journals/sensors/LiRFW17,
  author    = {Junhong Li and
               Wei Ren and
               Guoxiang Fan and
               Chenghao Wang},
  title     = {Design and Fabrication of Piezoelectric Micromachined Ultrasound Transducer
               (pMUT) with Partially-Etched ZnO Film},
  journal   = {Sensors},
  volume    = {17},
  number    = {6},
  pages     = {1381},
  year      = {2017},
  url       = {https://doi.org/10.3390/s17061381},
  doi       = {10.3390/s17061381},
  timestamp = {Wed, 14 Nov 2018 00:00:00 +0100},
  biburl    = {https://dblp.org/rec/journals/sensors/LiRFW17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}

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