@book{lieberman2005,
	edition = {1},
	title = {Principles of {Plasma} {Discharges} and {Materials} {Processing}},
	copyright = {http://doi.wiley.com/10.1002/tdm\_license\_1.1},
	isbn = {978-0-471-72001-0 978-0-471-72425-4},
	url = {https://onlinelibrary.wiley.com/doi/book/10.1002/0471724254},
	language = {en},
	urldate = {2026-05-20},
	publisher = {Wiley},
	author = {Lieberman, Michael A. and Lichtenberg, Allan J.},
	month = apr,
	year = {2005},
	doi = {10.1002/0471724254},
}

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