@article{10.1016/j.apsusc.2010.10.076,
doi = {10.1016/j.apsusc.2010.10.076},
url = {http://dx.doi.org/10.1016/j.apsusc.2010.10.076},
year = 2011,
publisher = {Elsevier {BV}},
volume = {257},
pages = {5138--5141},
author = {Tobias Liese and Volker Radisch and Inga Knorr and Michael Reese and Peter Gro{\ss}mann and Klaus Mann and Hans-Ulrich Krebs},
title = {Development of laser deposited multilayer zone plate structures for soft X-ray radiation},
journal = {Applied Surface Science}
}

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