X-Ray Spectral Measurement and Interpretation. Lifshin, E., Ciccarelli, M. F., & Bolon, R. B. In Goldstein, J. I. & Yakowitz, H., editors, Practical Scanning Electron Microscopy: Electron and Ion Microprobe Analysis, pages 263–297. Springer US, Boston, MA, 1975.
X-Ray Spectral Measurement and Interpretation [link]Paper  doi  abstract   bibtex   
Chemical analysis in the scanning electron microscope and electron microprobe is performed by measuring the energy and intensity distribution of the x-ray signal generated by a focused electron beam. The subject of x-ray production has already been introduced in the chapter on electron beam-specimen interactions (Chapter III), which describes the mechanisms for both characteristic and continuum x-ray production. This chapter is concerned with the methods for detecting and measuring these signals as well as converting them into a useful form for qualitative and quantitative analysis.
@incollection{lifshin_x-ray_1975,
	address = {Boston, MA},
	title = {X-{Ray} {Spectral} {Measurement} and {Interpretation}},
	isbn = {978-1-4613-4422-3},
	url = {https://doi.org/10.1007/978-1-4613-4422-3_7},
	abstract = {Chemical analysis in the scanning electron microscope and electron microprobe is performed by measuring the energy and intensity distribution of the x-ray signal generated by a focused electron beam. The subject of x-ray production has already been introduced in the chapter on electron beam-specimen interactions (Chapter III), which describes the mechanisms for both characteristic and continuum x-ray production. This chapter is concerned with the methods for detecting and measuring these signals as well as converting them into a useful form for qualitative and quantitative analysis.},
	language = {en},
	urldate = {2020-03-28},
	booktitle = {Practical {Scanning} {Electron} {Microscopy}: {Electron} and {Ion} {Microprobe} {Analysis}},
	publisher = {Springer US},
	author = {Lifshin, E. and Ciccarelli, M. F. and Bolon, R. B.},
	editor = {Goldstein, Joseph I. and Yakowitz, Harvey},
	year = {1975},
	doi = {10.1007/978-1-4613-4422-3_7},
	keywords = {Counter Tube, Crystal Spectrometer, Focus Electron Beam, Proportional Counter, Solid State Detector},
	pages = {263--297},
}

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