Reducing stress effects on multi-project-wafer reticles by optimizing metal densities and density gradients in an MPW placement flow. Lifu Chang, P. M. & Eric Beisser, J. Z. In Proceedings of SPIE, 2021.
doi  bibtex   
@inproceedings{spie2021mpwstress,
  title={Reducing stress effects on multi-project-wafer reticles by optimizing metal densities and density gradients in an MPW placement flow},
  author={Lifu Chang, Philippe More-Chaisemartin, Eric Beisser, Joshua Zusman, Frederic Brault},
  booktitle={Proceedings of SPIE},
  number={11614},
  doi={https://doi.org/10.1117/12.2583510},
  year={2021}
}

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