{"_id":"pB3NMDmJ6fYzgEFeC","bibbaseid":"lifuchang-ericbeisser-reducingstresseffectsonmultiprojectwaferreticlesbyoptimizingmetaldensitiesanddensitygradientsinanmpwplacementflow-2021","author_short":["Lifu Chang, P. M.","Eric Beisser, J. Z."],"bibdata":{"bibtype":"inproceedings","type":"inproceedings","title":"Reducing stress effects on multi-project-wafer reticles by optimizing metal densities and density gradients in an MPW placement flow","author":[{"propositions":[],"lastnames":["Lifu","Chang"],"firstnames":["Philippe","More-Chaisemartin"],"suffixes":[]},{"propositions":[],"lastnames":["Eric","Beisser"],"firstnames":["Joshua","Zusman"],"suffixes":[]}],"booktitle":"Proceedings of SPIE","number":"11614","doi":"https://doi.org/10.1117/12.2583510","year":"2021","bibtex":"@inproceedings{spie2021mpwstress,\r title={Reducing stress effects on multi-project-wafer reticles by optimizing metal densities and density gradients in an MPW placement flow},\r author={Lifu Chang, Philippe More-Chaisemartin, Eric Beisser, Joshua Zusman, Frederic Brault},\r booktitle={Proceedings of SPIE},\r number={11614},\r doi={https://doi.org/10.1117/12.2583510},\r year={2021}\r}\r\r","author_short":["Lifu Chang, P. M.","Eric Beisser, J. Z."],"bibbaseid":"lifuchang-ericbeisser-reducingstresseffectsonmultiprojectwaferreticlesbyoptimizingmetaldensitiesanddensitygradientsinanmpwplacementflow-2021","role":"author","urls":{},"metadata":{"authorlinks":{}}},"bibtype":"inproceedings","biburl":"https://bibbase.org/f/d67Ggq3sCqXLAGaqF/lchang-2023.bib","dataSources":["GaXnQzKJBLR3vyP4Y","ieXYZTBDmJowxfWJC"],"keywords":[],"search_terms":["reducing","stress","effects","multi","project","wafer","reticles","optimizing","metal","densities","density","gradients","mpw","placement","flow","lifu chang","eric beisser"],"title":"Reducing stress effects on multi-project-wafer reticles by optimizing metal densities and density gradients in an MPW placement flow","year":2021}