Optical and electrical properties of epitaxial (Mg,Cd)xZn1−xO, ZnO, and ZnO:(Ga,Al) thin films on c-plane sapphire grown by pulsed laser deposition. Lorenz, M., Kaidashev, E. M., von Wenckstern, H., Riede, V., Bundesmann, C., Spemann, D., Benndorf, G., Hochmuth, H., Rahm, A., Semmelhack, H. -., & Grundmann, M. Solid-State Electronics, 47(12):2205–2209, December, 2003. ![Optical and electrical properties of epitaxial (Mg,Cd)xZn1−xO, ZnO, and ZnO:(Ga,Al) thin films on c-plane sapphire grown by pulsed laser deposition [link]](https://bibbase.org/img/filetypes/link.svg "link")
Paper doi abstract bibtex A consistent set of epitaxial, n-type conducting ZnO thin films, nominally undoped, doped with Ga or Al, or alloyed with Mg or Cd, was grown by pulsed laser deposition (PLD) on single-crystalline c-plane sapphire (0001) substrates, and characterized by Hall measurement, and UV/VIS optical transmission spectroscopy. The optical band gap of undoped ZnO films at nearly 3.28 eV was shifted by alloying with Mg up to 4.5 eV and by alloying with Cd down to 3.18 eV, dependent on the alloy composition. In addition, highly doped ZnO:Al films show a blue-shifted optical absorption edge due to filling of electronic states in the conduction band. The Hall transport data of the PLD (Mg,Zn,Cd)O:(Ga,Al) thin films span a carrier concentration range of six orders of magnitude from 3×1014 to 3×1020 cm−3, which corresponds to a resistivity from 5×10−4 to 3×103 Ωcm. Structurally optimized, nominally undoped ZnO films grown with ZnO nucleation and top layer reached an electron mobility of 155 cm2/Vs (300 K), which is among the largest values reported for heteroepitaxial ZnO thin films so far. Finally, we succeeded in combining the low resistivity of ZnO:Ga and the band gap shift of MgZnO in MgZnO:Ga thin films. This results demonstrate the unique tunability of the optical and electrical properties of the ZnO-based wide-band gap material for future electronic devices.
@article{lorenz_optical_2003,
series = {Proceedings of the 9th {International} {Workshop} on {Oxide} {Electronics}},
title = {Optical and electrical properties of epitaxial ({Mg},{Cd}){xZn1}−{xO}, {ZnO}, and {ZnO}:({Ga},{Al}) thin films on c-plane sapphire grown by pulsed laser deposition},
volume = {47},
issn = {0038-1101},
shorttitle = {Optical and electrical properties of epitaxial ({Mg},{Cd}){xZn1}−{xO}, {ZnO}, and {ZnO}},
url = {https://www.sciencedirect.com/science/article/pii/S0038110103001989},
doi = {10.1016/S0038-1101(03)00198-9},
abstract = {A consistent set of epitaxial, n-type conducting ZnO thin films, nominally undoped, doped with Ga or Al, or alloyed with Mg or Cd, was grown by pulsed laser deposition (PLD) on single-crystalline c-plane sapphire (0001) substrates, and characterized by Hall measurement, and UV/VIS optical transmission spectroscopy. The optical band gap of undoped ZnO films at nearly 3.28 eV was shifted by alloying with Mg up to 4.5 eV and by alloying with Cd down to 3.18 eV, dependent on the alloy composition. In addition, highly doped ZnO:Al films show a blue-shifted optical absorption edge due to filling of electronic states in the conduction band. The Hall transport data of the PLD (Mg,Zn,Cd)O:(Ga,Al) thin films span a carrier concentration range of six orders of magnitude from 3×1014 to 3×1020 cm−3, which corresponds to a resistivity from 5×10−4 to 3×103 Ωcm. Structurally optimized, nominally undoped ZnO films grown with ZnO nucleation and top layer reached an electron mobility of 155 cm2/Vs (300 K), which is among the largest values reported for heteroepitaxial ZnO thin films so far. Finally, we succeeded in combining the low resistivity of ZnO:Ga and the band gap shift of MgZnO in MgZnO:Ga thin films. This results demonstrate the unique tunability of the optical and electrical properties of the ZnO-based wide-band gap material for future electronic devices.},
number = {12},
urldate = {2023-11-11},
journal = {Solid-State Electronics},
author = {Lorenz, M. and Kaidashev, E. M. and von Wenckstern, H. and Riede, V. and Bundesmann, C. and Spemann, D. and Benndorf, G. and Hochmuth, H. and Rahm, A. and Semmelhack, H. -C. and Grundmann, M.},
month = dec,
year = {2003},
keywords = {Electrical properties, Optical properties, Pulsed laser deposition, Thin films, Wide-band gap material, Zinc oxide},
pages = {2205--2209},
}
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