Optimized pre-thinning procedures of ion-beam thinning for TEM sample preparation by magnetorheological polishing. Luo, H., Yin, S., Zhang, G., Liu, C., Tang, Q., & Guo, M. Ultramicroscopy, 181:165–172, October, 2017. ![Optimized pre-thinning procedures of ion-beam thinning for TEM sample preparation by magnetorheological polishing [link]](https://bibbase.org/img/filetypes/link.svg "link")
Paper doi abstract bibtex Ion-beam-thinning is a well-established sample preparation technique for transmission electron microscopy (TEM), but tedious procedures and labor consuming pre-thinning could seriously reduce its efficiency. In this work, we present a simple pre-thinning technique by using magnetorheological (MR) polishing to replace manual lapping and dimpling, and demonstrate the successful preparation of electron-transparent single crystal silicon samples after MR polishing and single-sided ion milling. Dimples pre-thinned to less than 30 microns and with little mechanical surface damage were repeatedly produced under optimized MR polishing conditions. Samples pre-thinned by both MR polishing and traditional technique were ion-beam thinned from the rear side until perforation, and then observed by optical microscopy and TEM. The results show that the specimen pre-thinned by MR technique was free from dimpling related defects, which were still residual in sample pre-thinned by conventional technique. Nice high-resolution TEM images could be acquired after MR polishing and one side ion-thinning. MR polishing promises to be an adaptable and efficient method for pre-thinning in preparation of TEM specimens, especially for brittle ceramics.
@article{luo_optimized_2017,
title = {Optimized pre-thinning procedures of ion-beam thinning for {TEM} sample preparation by magnetorheological polishing},
volume = {181},
issn = {0304-3991},
url = {http://www.sciencedirect.com/science/article/pii/S0304399116303199},
doi = {10.1016/j.ultramic.2017.05.016},
abstract = {Ion-beam-thinning is a well-established sample preparation technique for transmission electron microscopy (TEM), but tedious procedures and labor consuming pre-thinning could seriously reduce its efficiency. In this work, we present a simple pre-thinning technique by using magnetorheological (MR) polishing to replace manual lapping and dimpling, and demonstrate the successful preparation of electron-transparent single crystal silicon samples after MR polishing and single-sided ion milling. Dimples pre-thinned to less than 30 microns and with little mechanical surface damage were repeatedly produced under optimized MR polishing conditions. Samples pre-thinned by both MR polishing and traditional technique were ion-beam thinned from the rear side until perforation, and then observed by optical microscopy and TEM. The results show that the specimen pre-thinned by MR technique was free from dimpling related defects, which were still residual in sample pre-thinned by conventional technique. Nice high-resolution TEM images could be acquired after MR polishing and one side ion-thinning. MR polishing promises to be an adaptable and efficient method for pre-thinning in preparation of TEM specimens, especially for brittle ceramics.},
urldate = {2017-07-17},
journal = {Ultramicroscopy},
author = {Luo, Hu and Yin, Shaohui and Zhang, Guanhua and Liu, Chunhui and Tang, Qingchun and Guo, Meijian},
month = oct,
year = {2017},
keywords = {Ion milling, Magnetorheological polishing, Pre-thinning, Sample preparation technique, Transmission electron microscopy},
pages = {165--172},
}
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In this work, we present a simple pre-thinning technique by using magnetorheological (MR) polishing to replace manual lapping and dimpling, and demonstrate the successful preparation of electron-transparent single crystal silicon samples after MR polishing and single-sided ion milling. Dimples pre-thinned to less than 30 microns and with little mechanical surface damage were repeatedly produced under optimized MR polishing conditions. Samples pre-thinned by both MR polishing and traditional technique were ion-beam thinned from the rear side until perforation, and then observed by optical microscopy and TEM. The results show that the specimen pre-thinned by MR technique was free from dimpling related defects, which were still residual in sample pre-thinned by conventional technique. Nice high-resolution TEM images could be acquired after MR polishing and one side ion-thinning. 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