Focused ion beam processing for 3d chiral photonics nanostructures. Manoccio, M., Esposito, M., Passaseo, A., Cuscunà, M., & Tasco, V. Micromachines, 12(1):1-28, MDPI AG, 2021. cited By 0![Focused ion beam processing for 3d chiral photonics nanostructures [link]](https://bibbase.org/img/filetypes/link.svg "link")
Paper doi abstract bibtex The focused ion beam (FIB) is a powerful piece of technology which has enabled scientific and technological advances in the realization and study of micro-and nano-systems in many research areas, such as nanotechnology, material science, and the microelectronic industry. Recently, its applications have been extended to the photonics field, owing to the possibility of developing systems with complex shapes, including 3D chiral shapes. Indeed, micro-/nano-structured elements with precise geometrical features at the nanoscale can be realized by FIB processing, with sizes that can be tailored in order to tune optical responses over a broad spectral region. In this review, we give an overview of recent efforts in this field which have involved FIB processing as a nanofabrication tool for photonics applications. In particular, we focus on FIB-induced deposition and FIB milling, employed to build 3D nanostructures and metasurfaces exhibiting intrinsic chirality. We describe the fabrication strategies present in the literature and the chiro-optical behavior of the developed structures. The achieved results pave the way for the creation of novel and advanced nanophotonic devices for many fields of application, ranging from polarization control to integration in photonic circuits to subwavelength imaging. © 2020 by the authors. Licensee MDPI, Basel, Switzerland.
@ARTICLE{Manoccio20211,
author={Manoccio, M. and Esposito, M. and Passaseo, A. and Cuscunà, M. and Tasco, V.},
title={Focused ion beam processing for 3d chiral photonics nanostructures},
journal={Micromachines},
year={2021},
volume={12},
number={1},
pages={1-28},
doi={10.3390/mi12010006},
art_number={6},
note={cited By 0},
url={https://www.scopus.com/inward/record.uri?eid=2-s2.0-85098736695&doi=10.3390%2fmi12010006&partnerID=40&md5=38d679bcc74f019127c1dad1d4f7a52c},
abstract={The focused ion beam (FIB) is a powerful piece of technology which has enabled scientific and technological advances in the realization and study of micro-and nano-systems in many research areas, such as nanotechnology, material science, and the microelectronic industry. Recently, its applications have been extended to the photonics field, owing to the possibility of developing systems with complex shapes, including 3D chiral shapes. Indeed, micro-/nano-structured elements with precise geometrical features at the nanoscale can be realized by FIB processing, with sizes that can be tailored in order to tune optical responses over a broad spectral region. In this review, we give an overview of recent efforts in this field which have involved FIB processing as a nanofabrication tool for photonics applications. In particular, we focus on FIB-induced deposition and FIB milling, employed to build 3D nanostructures and metasurfaces exhibiting intrinsic chirality. We describe the fabrication strategies present in the literature and the chiro-optical behavior of the developed structures. The achieved results pave the way for the creation of novel and advanced nanophotonic devices for many fields of application, ranging from polarization control to integration in photonic circuits to subwavelength imaging. © 2020 by the authors. Licensee MDPI, Basel, Switzerland.},
publisher={MDPI AG},
issn={2072666X},
document_type={Review},
source={Scopus},
}
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