Metal-embedded SU-8 slab techniques for low-resistance micromachined inductors. Mapato, M., Klysuban, P., Kulworawanichpong, T., & Chomnawang, N. International Journal of Electrical and Computer Engineering, 8(6):4772–80, 2018.
bibtex   
@article{mapato2018metal,
  title={Metal-embedded SU-8 slab techniques for low-resistance micromachined inductors},
  author={Mapato, Manot and Klysuban, Prapong and Kulworawanichpong, Thanatchai and Chomnawang, Nimit},
  journal={International Journal of Electrical and Computer Engineering},
  volume={8},
  number={6},
  pages={4772--80},
  year={2018}
}

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