@article{marichy_2016_admi.201600335, title = {Atomic {Layer} {Deposition} to {Materials} for {Gas} {Sensing} {Applications}}, volume = {3}, doi = {10.1002/admi.201600335}, number = {21, SI}, journal = {Advanced Materials Interfaces}, author = {Marichy, C. and Pinna, N.}, year = {2016}, note = {bibtex*[url=;booktitle=]} }